APPARATUS AND METHODS FOR MICRO-TRANSFER-PRINTING
In an aspect, a system and method for assembling a semiconductor device on a receiving surface of a destination substrate is disclosed. In another aspect, a system and method for assembling a semiconductor device on a destination substrate with topographic features is disclosed. In another aspect, a gravity-assisted separation system and method for printing semiconductor device is disclosed. In another aspect, various features of a transfer device for printing semiconductor devices are disclosed.
1 . A conformable transfer device with reduced crowning, the transfer device comprising:
a bulk volume having a first surface and a second surface, opposite the first surface, and a side between the first surface and the second surface, wherein the bulk area comprises a tapered surface connecting the side to the first surface; and
a plurality of printing posts disposed on the first surface of the bulk volume for picking up printable material, wherein the plurality of printing posts and the bulk volume are arranged such that a force applied to the second surface of the bulk volume is transmitted to the plurality of printing posts.
2 . The device of claim 1 , wherein an aspect ratio(height to width) of each post of the plurality of posts is less than or equal to 4:1 (e.g., from 2:1 to 4:1).
3 - 8 . (canceled)
9 . The device of claim 1 , wherein the plurality of printing posts have a first Young's modulus and the base has a second Young's modulus, greater than the first Young's modulus.
10 - 16 . (canceled)
17 . The device of claim 1 , wherein a least a portion of the posts are arranged on the first surface from 1 mm to 15 mm away from a edge of the first surface (e.g., from 1 mm to 5 mm or 5 mm to 10 mm, 10 mm to 15 mm from the edge).
18 . The device of claim 1 , wherein the bulk volume has a side surface between the first and second surfaces.
19 . (canceled)
20 . The devices of claim 18 , wherein the side surface has a rounded profile (e.g., convex or concave).
21 . The device of claim 18 , wherein the side surface has a beveled edge forming an angle from horizontal (parallel to the first surface) of no greater than 75° (e.g., no greater than 60°, no greater than 45°, no greater than 30°, or no greater than 15°).
22 . A conformable transfer device comprising an elastomer (e.g., PDMS) slab (e.g., bulk volume) having a mesa configuration with a surface upon which a plurality of (e.g., array of) posts are disposed, wherein one or more of the following holds [any of (i), (ii), and/or (iii)]:
(i) the edge of the mesa has a beveled and/or rounded edge so as to reduce distortion of the surface and allow accurate spacing of the plurality of posts;
(ii) the plurality of posts are arranged on the surface at least 1 mm away from the edge (e.g., from 1 mm to 5 mm or 5 mm to 20 mm from the edge); and
(iii) the mesa has a thickness no greater than 10 mm (e.g., from 1 to 5 mm).
23 . The device of claim 22 , wherein the edge of the mesa has a beveled edge forming an angle from horizontal (parallel to the surface) of no greater than 75° (e.g., no greater than 60°, no greater than 45°, no greater than 30°, or no greater than 15°).
24 . The device of claim 22 , wherein the edge of the mesa has a rounded profile (e.g., convex or concave).
25 - 32 . (canceled)
33 . The device of claim 22 , wherein the posts have a first Young's modulus and the mesa has a second Young's modulus, greater than the first Young's modulus.
34 - 41 . (canceled)
42 . A conformable transfer device, the transfer device comprising:
a bulk volume having a first surface and a second surface, opposite the first surface;
a mesa disposed on the bulk volume;
a layer comprising a plurality of posts (e.g., array of posts) disposed on the mesa, opposite the bulk volume, for picking up printable material, wherein the plurality of posts, the mesa, and the bulk volume are arranged such that a force applied to the second surface of the bulk volume is transmitted to the plurality of posts.
43 . The device of claim 42 , wherein a thickness of the mesa is greater than a thickness of the posts.
44 . The device of claim 42 , wherein an aspect ratio(height to width) of each post of the plurality of posts is less than or equal to 4:1 (e.g., from 2:1 to 4:1).
45 - 47 . (canceled)
48 . The device of claim 42 , wherein a ratio of a thickness of the posts to a thickness of the bulk volume is from 1:1 to 1:10 (e.g., from 1:1 to 1:2, 1:2 to 1:4, 1:4 to 1:6, 1:6 to 1:8, or 1:8 to 1:10).
49 - 50 . (canceled)
51 . The device of claim 42 , wherein the posts have a first Young's modulus and the bulk volume has a second Young's modulus, greater than the first Young's modulus.
52 . (canceled)
53 . The device of claim 51 , wherein the mesa has the second Young's modulus.
54 - 61 . (canceled)
62 . The device of claim 42 , wherein the bulk volume has a side surface between the first and second surfaces.
63 . (canceled)
64 . The devices of claim 62 , wherein the side surface has a rounded profile (e.g., convex or concave).
65 . The device of claim 62 , wherein the side surface has a beveled edge forming an angle from horizontal (parallel to the first surface) of no greater than 75° (e.g., no greater than 60°, no greater than 45°, no greater than 30°, or no greater than 15°).
66 - 86 . (canceled)