Touch panel, method for fabricating the same and touch display device
A touch panel, a method for fabricating the same and a touch display device are disclosed. The touch panel includes touch units, each of which includes: a capacitor having a first terminal connected to a first bias voltage; a first transistor having an amorphous silicon active layer, one of a source and a drain of the first transistor is connected to a third bias voltage and the other is connected to a second terminal of the capacitor; a second transistor having an oxide semiconductor active layer, a gate of the second transistor is connected to a scan line, one of a source and a drain of the second transistor is connected to the second terminal of the capacitor and the other is connected to a data line. The touch panel further includes a light-shielding layer; an aperture portion is disposed on a part of the light-shielding layer.
1. A method for fabricating a touch panel, comprising:
forming a gate electrode of a first transistor and a gate electrode of a second transistor on a substrate;
forming a gate insulation layer;
forming an active layer of the first transistor in at least a part of region of the gate insulation layer that corresponds to the gate electrode of the first transistor; and
forming an active layer of the second transistor in at least a part of region of the gate insulation layer that corresponds to the gate electrode of the second transistor;
wherein the active layer of the first transistor is formed from amorphous silicon and the active layer of the second transistor is formed from oxide semiconductor;
wherein before forming the active layer of the first transistor, the method further comprises: forming a protection layer overlaying the active layer of the second transistor and removing the protection layer through an etching process.
2. The method of claim 1 , further comprising:
forming an etch stop layer on the active layer of the second transistor, wherein a via hole is formed in the etch stop layer;
forming a source electrode and a drain electrode of the first transistor as well as a source electrode and a drain electrode of the second transistor; and
forming a passivation layer.