Array of cross point memory cells
View Patent ↗An array of cross point memory cells comprises spaced first lines which cross spaced second lines. Two memory cells are individually between one of two immediately adjacent of the second lines and a same single one of the first lines.
1. An array of cross point memory cells comprising:
spaced lower first lines, spaced upper second lines which cross the first lines, and two memory cells individually elevationally between one of two immediately adjacent of the second lines and a same single one of the first lines, the memory cells individually comprising:
a select device and a programmable device in series with and directly electrically coupled to each other, the select device being proximate and directly electrically coupled to one of the first or second lines, the programmable device being proximate and directly electrically coupled to one of the other of the first or second lines; and
the programmable device comprising:
a first pillar electrode elevationally over the one first line, the first pillar electrode comprising a top and opposing sidewalls, the first pillar electrode being shared by the two memory cells;
programmable material laterally outward of one of the opposing sidewalls of the first pillar electrode;
a second electrode laterally and elevationally outward of the programmable material that is laterally outward of the one opposing sidewall of the first pillar electrode; and
one of the first pillar electrode or the second electrode being directly electrically coupled to the select device, the other of the first pillar electrode or the second electrode being directly electrically coupled to the one of the other of the first or second lines.
2. The array of claim 1 wherein the programmable material is over the top of the first pillar electrode.
3. An array of cross point memory cells comprising:
spaced lower first lines, spaced upper second lines which cross the first lines, and two memory cells individually elevationally between one of two immediately adjacent of the second lines and a same single one of the first lines, the memory cells individually comprising:
a select device and a programmable device in series with each other, the select device being proximate and electrically coupled to one of the first or second lines, the programmable device being proximate and electrically coupled to one of the other of the first or second lines; and
the programmable device comprising:
a first pillar electrode elevationally over the one first line, the first pillar electrode comprising a top and opposing sidewalls, the first pillar electrode being shared by the two memory cells;
programmable material laterally outward of one of the opposing sidewalls of the first pillar electrode;
a second electrode outward of the programmable material that is laterally outward of the one opposing sidewall of the first pillar electrode;
one of the first pillar electrode or the second electrode being electrically coupled to the select device, the other of the first pillar electrode or the second electrode being electrically coupled to the one of the other of the first or second lines; and
the programmable material comprises a continuous layer extending over the opposing sidewalls and the top of the first pillar electrode.
4. An array of cross point memory cells comprising:
spaced lower first lines, spaced upper second lines which cross the first lines, and two memory cells individually elevationally between one of two immediately adjacent of the second lines and a same single one of the first lines, the memory cells individually comprising:
a select device and a programmable device in series with each other, the select device being proximate and electrically coupled to one of the first or second lines, the programmable device being proximate and electrically coupled to one of the other of the first or second lines;
the programmable device comprising:
a first pillar electrode elevationally over the one first line, the first pillar electrode comprising a top and opposing sidewalls, the first pillar electrode being shared by the two memory cells;
programmable material laterally outward of one of the opposing sidewalls of the first pillar electrode;
a second electrode outward of the programmable material that is laterally outward of the one opposing sidewall of the first pillar electrode; and
one of the first pillar electrode or the second electrode being electrically coupled to the select device, the other of the first pillar electrode or the second electrode being electrically coupled to the one of the other of the first or second lines; and
the second electrodes individually comprising a non-shared conductive pillar comprising a pair of laterally outermost corner edges in straight-line horizontal cross section, the second lines having laterally outermost longitudinal sidewalls that laterally align elevationally over the pairs of said laterally outermost corner edges of the non-shared conductive pillars along the second lines.
5. An array of cross point memory cells comprising:
spaced lower first lines, spaced upper second lines which cross the first lines, and two memory cells individually elevationally between one of two immediately adjacent of the second lines and a same single one of the first lines, the memory cells individually comprising:
a select device and a programmable device in series with each other, the select device being proximate and electrically coupled to one of the first or second lines, the programmable device being proximate and electrically coupled to one of the other of the first or second lines;
the programmable device comprising:
a first pillar electrode elevationally over the one first line, the first pillar electrode comprising a top and opposing sidewalls, the first pillar electrode being shared by the two memory cells;
programmable material laterally outward of one of the opposing sidewalls of the first pillar electrode;
a second electrode outward of the programmable material that is laterally outward of the one opposing sidewall of the first pillar electrode; and
one of the first pillar electrode or the second electrode being electrically coupled to the select device, the other of the first pillar electrode or the second electrode being electrically coupled to the one of the other of the first or second lines; and
the second electrodes individually comprising a non-shared conductive pillar comprising laterally outermost corner edges in straight-line horizontal cross section, the second lines having laterally outermost longitudinal sidewalls that do not laterally align with any laterally outermost corner edges of the non-shared conductive pillars.
6. The array of claim 1 wherein the programmable material is beneath the second electrode between two immediately adjacent of the first lines.
7. The array of claim 1 wherein the first pillar electrode has a maximum conductive material width that is greater than that of the second electrode laterally proximate the programmable material that is laterally outward of the one opposing sidewall of the first pillar electrode.
8. An array of cross point memory cells comprising:
spaced lower first lines, spaced upper second lines which cross the first lines, and two memory cells individually elevationally between one of two immediately adjacent of the second lines and a same single one of the first lines, the memory cells individually comprising:
a select device and a programmable device in series with and directly electrically coupled to each other, the select device being proximate and directly electrically coupled to one of the first lines, the programmable device being proximate and directly electrically coupled to one of the second lines; and
the programmable device comprising:
a first pillar electrode elevationally over and directly electrically coupled to the select device, the first pillar electrode comprising a top and opposing sidewalls, the first pillar electrode and the select device being shared by the two memory cells;
programmable material laterally outward of one of the opposing sidewalls of the first pillar electrode; and
a second pillar electrode laterally and elevationally outward of the programable material that is laterally outward of the one opposing sidewall of the first pillar electrode, the second pillar electrode being directly electrically coupled to the one second line.
9. The array of claim 8 wherein the programmable material is elevationally over the top of the first pillar electrode.
10. The array of claim 9 wherein the programmable material is beneath the second pillar electrode between two immediately adjacent of the first lines.
11. The array of claim 10 wherein the programmable material is continuous over multiple of the tops and sidewalls of multiple of the first pillar electrodes and beneath multiple of the second pillar electrodes between two immediately adjacent of the first lines.