IP Library Granted Patent US 10,354,866
Granted Patent B2
US 10,354,866 · App. 14/809,672 · Granted Jul 16, 2019

Equipment and method to automatically transfer a graphene monolayer to a substrate

Inventors: Amaia Zurutuza Elorza (Gipuzkoa, ES); Alba Centeno Perez (Gipuzkoa, ES); Beatriz Alonso Rodriguez (Gipuzkoa, ES); Amaia Pesquera Rodriguez (Bizkaia, ES); Jesus De La Fuente Cosio (Araba, ES)
Assignee: GRAPHENEA, S.A.
H01L21/02527C01B32/194C23C16/01C23C16/26H01L21/02118H01L21/6708H01L21/67253H01L21/02491H01L21/02664H01L29/1606
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Quick Facts
Patent No.
US 10,354,866
App. No.
14/809,672
Granted
Jul 16, 2019
Kind
B2
Abstract

Equipment to automatically transfer a graphene monolayer deposited on a metal layer and protected with a polymer layer to a substrate, comprising at least one liquid inlet, at least one sensor to control the level and pH of the liquids, at least one liquid outlet to drain the liquids, a stirring element to homogenise the liquid mixture and a ramp to feed in the substrate and method to automatically transfer a graphene monolayer to a substrate, which uses said equipment.

Claims (11)

1. A device comprising:

a vessel adapted to automatically transfer a graphene monolayer deposited on a metal layer and protected with a polymer layer to a substrate, the vessel comprising a volume having a top section, a bottom section, and a middle section between the top section and the bottom section, the volume having a plurality of round cross-sections in a plurality of planes, the plurality of cross-sections including a first cross-section located in the bottom section and having a first radius, a second cross-section located in the middle section and having a second radius larger than the first radius, and a third cross-section located in the top section and having a third radius larger than the second radius,

at least one first computer-controlled valve adapted to allow entry of first liquids into the vessel, the at least one first computer-controlled valve being disposed in the top section,

at least one first sensor adapted to control a level and pH of a second liquid disposed in the vessel,

at least one second computer-controlled valve adapted to drain third liquids from the vessel, the at least one second computer-controlled valve being disposed in the bottom section,

a stirring element adapted to homogenize a mixture comprising one or more liquids, the stirring element disposed in the bottom section,

a plurality of supports adapted to support the substrate, the plurality of supports being located in a plane located in the middle section of the volume,

a ramp adapted to feed the substrate into the vessel, the ramp having a first portion disposed outside the vessel and a second portion disposed inside the vessel, the ramp intersecting a side of the vessel in the middle section of the vessel, the ramp forming a selected angle with one or more of the plurality of planes, the ramp extending into the vessel and intersecting with the plane associated with the plurality of supports, and

a computer-controlled unit configured to control liquid handling, etching of the metal layer, and positioning of the graphene monolayer on the substrate.

2. The device according to claim 1 , further comprising:

a shower adapted to dispense the third liquids.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 20, 2021
From: GRAPHENEA, S.A.
To: GRAPHENEA SEMICONDUCTOR, S.L.U.
Reel/Frame 056298/0362 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 18, 2015
From: ZURUTUZA ELORZA, AMAIA; CENTENO PEREZ, ALBA; ALONSO RODRIGUEZ, BEATRIZ; PESQUERA RODRIGUEZ, AMAIA; DE LA FUENTE COSIO, JESUS
To: GRAPHENEA, S.A.
Reel/Frame 036344/0406 →
Continuity (1)
Related Publication 20170032962A1 · Feb 2, 2017