Radiation detector fabrication
The present approach relates to the fabrication of radiation detectors. In certain embodiments, additive manufacture techniques, such as 3D metallic printing techniques are employed to fabricate one or more parts of a detector. In an example of one such printing embodiment, amorphous silicon may be initially disposed onto a substrate and a laser may be employed to melt some or all of the amorphous silicon so as to form crystalline silicon circuitry of a light imager panel. Such printing techniques may also be employed to fabricate other aspects of a radiation detector, such as a scintillator layer.
1. A method for fabricating a light imager panel of an X-ray radiation detector, comprising:
using 3D metallic printing techniques to print, by selective deposition, amorphous silicon (a-Si) on a substrate to form circuitry traces corresponding to field effect transistors, photodiodes, and charge amplifiers;
melting the circuitry traces formed from the selectively deposited a-Si; and
subsequently solidifying the circuitry traces to form crystalline silicon (c-Si) circuits on the substrate, wherein the c-Si circuits comprise at least a plurality of detector pixels each comprising at least a respective field effect transistor, a photodiode, and a charge amplifier wherein the crystalline silicon (c-Si) circuits correspond to semiconductor regions of the respective field effect transistors, photodiodes, and charge amplifiers.
2. The method of claim 1 , wherein the substrate comprises one or more of a glass, metal, ceramic, carbon or plastic substrate.
3. The method of claim 1 , wherein the substrate is a single piece and is at least 22 cm in one dimension.
4. The method of claim 1 , wherein the c-Si circuits further comprise one or both of column readout electronics or row readout selection circuitry formed on the substrate.
5. The method of claim 1 , further comprising:
printing a scintillator layer on the substrate over the c-Si circuits.
6. The method of claim 5 , wherein printing the scintillating layer comprises printing a pixelated scintillator layer, wherein pixels of the scintillator layer each correspond to respective pixels of the light imager panel.
7. The method of claim 5 , further comprising:
printing a reflector over the scintillator layer.
8. The method of claim 5 , further comprising:
printing a cover above the scintillator layer.
9. The method of claim 5 , further comprising:
printing an anti-scatter grid above the scintillator layer.
10. A method for fabricating a scintillator of a radiation detector, comprising:
providing a light imager panel by printing the light imager panel circuitry onto a substrate using a 3D printer, wherein printing the light imager panel circuitry comprises printing amorphous silicon (a-Si) onto the substrate, melting the a-Si, and crystallizing the melted a-Si to form crystalline silicon (c-Si) circuitry;
printing pixelated regions of scintillating material over only respective pixels of the light imager panel; and
printing cladding material between the pixelated regions of scintillating material.
11. The method of claim 10 , wherein printing the layer of scintillator material comprises:
printing pixelated regions of scintillating material over respective pixels of the light imager panel, wherein the scintillating material within each pixelated region is printed so as to comprise non-linear structures of scintillating material.
12. The method of claim 10 , wherein printing pixelated regions of scintillating material over only respective pixels of the light imager panel comprises printing pixelated regions of scintillating material by selective deposition of scintillating material over only respective pixels of the light imager panel.
13. The method of claim 10 , wherein printing cladding material between the pixelated regions of scintillating material comprises printing cladding material by selective deposition between the pixelated regions of scintillating material.