Inspection method and its apparatus for thermal assist type magnetic head element

1. An inspection apparatus for a thermal assist type magnetic head element, the inspection apparatus comprising:

a table unit on which a thermal assist type magnetic head element, which is a specimen, including a magnetic field generating portion and a near-field light emitting portion is placed and which is movable in a plane;

a cantilever that includes a probe including a magnetic film and a noble metal film on a surface thereof and scans the surface of the specimen placed on the table unit;

a probe height adjusting unit that adjusts a distance between the probe of the cantilever and the surface of the specimen;

a vibration driving unit that vibrates the cantilever with a predetermined period and a predetermined amplitude in a vertical direction relative to the surface of the specimen;

a signal output unit that outputs a signal generating a magnetic field from the magnetic field generating portion of the thermal assist type magnetic head element and a signal for generating near-field light from the near-field light emitting portion;

a displacement detecting unit that detects the vibration of the cantilever by irradiating the surface of the cantilever opposite to the surface of the cantilever, on which the probe is formed, with light and detecting light reflected from the cantilever when the thermal assist type magnetic head element is moved in a plane by the table unit while a magnetic field is generated from the magnetic field generating portion of the thermal assist type magnetic head element by the signal output from the signal output unit and the cantilever is vibrated by the vibration driving unit;

a scattered light detecting unit that detects scattered light generated from the surface of the probe of the cantilever by near-field light, which is generated from the near-field light emitting portion of the thermal assist type magnetic head element by the signal output from the signal output unit, and leaking light; and

a controller that includes a lock-in amplifier to which a frequency signal allowing the vibration driving unit to vibrate the cantilever with a predetermined period or a signal of an integer multiple of the frequency signal is input as a reference signal and which extracts a scattered light component of the near-field light and a scattered light component of the leaking light from a detection signal obtained when the scattered light is detected by the scattered light detecting unit, and a signal processing unit obtaining a generation area of the near-field light of the thermal assist type magnetic head element from the scattered light component of the near-field light and the scattered light component of the leaking light extracted by the lock-in amplifier, and the controller controlling the table unit, the probe height adjusting unit, the vibration driving unit, the signal output unit, the displacement detecting unit, and scattered light detecting unit.

2. The inspection apparatus for a thermal assist type magnetic head element according to claim 1 ,

wherein the controller controls the probe height adjusting unit and the vibration driving unit to switch a height of the probe and a vibration amplitude of the probe to a case in which the generation area of the near-field light generated from the near-field light emitting portion of the thermal assist type magnetic head element is scanned and measured by the probe of the cantilever and a case in which an area distant from the generation area of the near-field light in a height direction is scanned and measured by the probe of the cantilever.

3. The inspection apparatus for a thermal assist type magnetic head element according to claim 2 ,

wherein when the generation area of the near-field light generated from the near-field light emitting portion of the thermal assist type magnetic head element is scanned and measured by the probe of the cantilever, the controller controls the probe height adjusting unit to set the height of the probe to 10 nm or less and controls the vibration driving unit to set the vibration amplitude of the probe to 10 nm or less.

4. The inspection apparatus for a thermal assist type magnetic head element according to claim 2 ,

wherein when an area distant from the generation area of the near-field light in the height direction is scanned and measured by the probe of the cantilever, the controller controls the probe height adjusting unit to set the height of the probe to 100 to 150 nm or more and controls the vibration driving unit to set the vibration amplitude of the probe in the range of 50 to 100 nm.

5. The inspection apparatus for a thermal assist type magnetic head element according to claim 1 ,

wherein when the generation area of the near-field light generated from the near-field light emitting portion of the thermal assist type magnetic head element is scanned and measured by the probe of the cantilever, the controller controls the probe height adjusting unit to set the height of the probe to 10 nm or less and controls the vibration driving unit to set the vibration amplitude of the probe to 10 nm or less.

6. The inspection apparatus for a thermal assist type magnetic head element according to claim 1 ,

wherein when an area distant from the generation area of the near-field light in the height direction is scanned and measured by the probe of the cantilever, the controller controls the probe height adjusting unit to set the height of the probe to 100 to 150 nm or more and controls the vibration driving unit to set the vibration amplitude of the probe in the range of 50 to 100 nm.

7. The inspection apparatus for a thermal assist type magnetic head element according to claim 1 ,

wherein when the thermal assist type magnetic head element is moved in a plane by the table unit and the vibration of the cantilever is detected by the displacement detecting unit while a writing magnetic field is generated from the magnetic field generating portion of the thermal assist type magnetic head element and the cantilever is vibrated by the vibration driving unit and when an area distant from the generation area of the near-field light in the height direction is scanned by the probe of the cantilever to measure the leaking light, the controller sets the height of the probe adjusted by the probe height adjusting unit in the range of 20 to 50 nm, sets the vibration amplitude of the probe driven by the vibration driving unit in the range of 50 to 100 nm, and simultaneously performs the measurement of the writing magnetic field and the measurement of the leaking light.

8. The inspection apparatus for a thermal assist type magnetic head element according to claim 1 ,

wherein the controller switches the scanning and measurement of the generation area of the near-field light generated from the near-field light emitting portion of the thermal assist type magnetic head element, which are performed by the probe of the cantilever, and the scanning and measurement of an area distant from the generation area of the near-field light in the height direction, which are performed by the probe of the cantilever, each time the movement of the table unit is reversed.

9. An inspection method for a thermal assist type magnetic head element, the inspection method comprising:

obtaining a writing magnetic field generation area of a thermal assist type magnetic head element by moving a table unit in a plane and detecting a vibration of a cantilever, which includes a probe including a magnetic film and a noble metal film on a surface thereof, while the thermal assist type magnetic head element, which is a specimen, including a magnetic field generating portion and a near-field light emitting portion is placed on the table unit and a writing magnetic field is generated from the magnetic field generating portion of the thermal assist type magnetic head element;

setting a height of the probe of the cantilever from the near-field light emitting portion and a vibration amplitude of the probe to conditions that are required to measure near-field light generated from the near-field light emitting portion while near-field light is generated from the near-field light emitting portion of the thermal assist type magnetic head element, and detecting reflected and scattered light generated from the probe by scanning an area, which includes an area generating the near-field light, by the probe;

inputting a detection signal, which is obtained when the scattered light generated from the probe is detected, to a lock-in amplifier to which a frequency signal allowing the probe to be vibrated with a predetermined period or a signal of an integer multiple of the frequency signal is input as a reference signal, and extracting a scattered light component of the near-field light and a scattered light component of leaking light from the detection signal, which is obtained when the scattered light is detected;

setting the height of the probe of the cantilever from the near-field light emitting portion and the vibration amplitude of the probe to conditions that are required to measure an area higher than an area from which the near-field light is generated while near-field light is generated from the near-field light emitting portion of the thermal assist type magnetic head element, and detecting reflected and scattered light generated from the probe by scanning the area, which is higher than the area from which the near-field light is generated, by the probe;

inputting a signal, which is obtained when the reflected and scattered light generated from the probe is detected, to a lock-in amplifier to which a frequency signal allowing the probe to be vibrated with a predetermined period or a signal of an integer multiple of the frequency signal is input as a reference signal, and extracting a scattered light component of leaking light of the area, which is higher than the area from which the near-field light is generated, from the detection signal that is obtained when the scattered light is detected; and

obtaining a generation area of near-field light of the thermal assist type magnetic head element from information about the scattered light component of the near-field light of the area, from which the extracted near-field light is generated, and a scattered light component of leaking light and information about the scattered light component of leaking light of the area that is higher than the area from which the near-field light is generated.

10. The inspection method for a thermal assist type magnetic head element according to claim 9 ,

wherein the height of the probe and the vibration amplitude of the probe are switched to a case in which the generation area of the near-field light generated from the near-field light emitting portion of the thermal assist type magnetic head element is scanned and measured by the probe of the cantilever and a case in which an area distant from the generation area of the near-field light in a height direction is scanned and measured by the probe of the cantilever.

11. The inspection method for a thermal assist type magnetic head element according to claim 10 ,

wherein when the generation area of the near-field light generated from the near-field light emitting portion of the thermal assist type magnetic head element is scanned and measured by the probe of the cantilever, the height of the probe is set to 10 nm or less and the vibration amplitude of the probe is set to 10 nm or less.

12. The inspection method for a thermal assist type magnetic head element according to claim 10 ,

wherein when an area distant from the generation area of the near-field light in the height direction is scanned and measured by the probe of the cantilever, the height of the probe is set to 100 to 150 nm or more and the vibration amplitude of the probe is set in the range of 50 to 100 nm.

13. The inspection method for a thermal assist type magnetic head element according to claim 9 ,

wherein when the generation area of the near-field light generated from the near-field light emitting portion of the thermal assist type magnetic head element is scanned and measured by the probe of the cantilever, the height of the probe is set to 10 nm or less and the vibration amplitude of the probe is set to 10 nm or less.

14. The inspection method for a thermal assist type magnetic head element according to claim 9 ,

wherein when an area distant from the generation area of the near-field light in the height direction is scanned and measured by the probe of the cantilever, the height of the probe is set to 100 to 150 nm or more and the vibration amplitude of the probe is set in the range of 50 to 100 nm.

15. The inspection method for a thermal assist type magnetic head element according to claim 9 ,

wherein when the thermal assist type magnetic head element is moved in a plane and the vibration of the cantilever is detected while a magnetic field is generated from the magnetic field generating portion of the thermal assist type magnetic head element and the cantilever is vibrated and when an area distant from the generation area of the near-field light in the height direction is scanned by the probe of the cantilever to measure the leaking light, the height of the probe is set in the range of 20 to 50 nm, the vibration amplitude of the probe is set in the range of 50 to 100 nm, and the measurement of the writing magnetic field generation area and the measurement of the leaking light are simultaneously performed.

16. The inspection method for a thermal assist type magnetic head element according to claim 9 ,

wherein the scanning and measurement of the generation area of the near-field light generated from the near-field light emitting portion of the thermal assist type magnetic head element, which are performed by the probe of the cantilever, and the scanning and measurement of an area distant from the generation area of the near-field light in the height direction, which are performed by the probe of the cantilever, are switched whenever the movement of the table unit is reversed.