IP Library Granted Patent US 9,368,216
Granted Patent B2
US 9,368,216 · App. 14/813,711 · Granted Jun 14, 2016

Interconnections for 3D memory

Inventor: Toru Tanzawa (Tokyo, JP)
Assignee: Micron Technology, Inc.
G11C16/10G11C5/02G11C5/06G11C5/063G11C16/26H01L27/11524H01L27/11529H01L27/11551G11C16/08G11C16/16
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Quick Facts
Patent No.
US 9,368,216
App. No.
14/813,711
Granted
Jun 14, 2016
Kind
B2
Abstract

Apparatuses and methods for interconnections for 3D memory are provided. One example apparatus can include a stack of materials including a plurality of pairs of materials, each pair of materials including a conductive line formed over an insulation material. The stack of materials has a stair step structure formed at one edge extending in a first direction. Each stair step includes one of the pairs of materials. A first interconnection is coupled to the conductive line of a stair step, the first interconnection extending in a second direction substantially perpendicular to a first surface of the stair step.

Claims (32)

1. An apparatus, comprising:

a memory array having a stack of conductive lines with a wide width portion and a narrow width portion, the narrow width portion having a stair step structure; and

a controller coupled to the memory array, the controller configured to control:

performing a number of operations; and

equalizing potential of access lines for a block of the memory array after the number of operations is completed,

wherein the stack of conductive lines is coupled to circuitry below the memory array through top planar interconnections coupled between ascending interconnections and descending interconnections, the top planar interconnections have a longest dimension in a direction different from a direction of a longest dimension of the conductive lines.

2. The apparatus of claim 1 , wherein the conductive lines, the ascending interconnections, the descending interconnections, and the top planar interconnections are all formed of a same conductive material.

3. The apparatus of claim 1 , wherein the stack of conductive lines are coupled to circuitry below the memory array through bottom planar interconnections located below the memory array coupled to the descending interconnections.

4. The apparatus of claim 1 , wherein the descending interconnections have a longest dimension in a direction substantially the same as the direction of the longest dimension of the conductive lines.

5. The apparatus of claim 1 , wherein the controller is configured to control discharging the equalized access lines of the block of memory array to a ground reference potential.

6. The apparatus of claim 1 , wherein the controller is configured to control discharging the equalized access lines of the block of memory array to potentials different than a ground reference potential.

7. The apparatus of claim 1 , wherein the controller is configured to control equalizing potential of a select gate line for the block of the memory array after the number of operations is completed.

8. The apparatus of claim 7 , wherein the controller is configured to control discharging the equalized select gate line of the block of memory array to a ground reference potential.

9. The apparatus of claim 7 , wherein the controller is configured to control discharging the equalized select gate line of the block of memory array to a potential different than a ground reference potential.

10. An apparatus, comprising:

a memory array having access lines with a wide width portion and a narrow width portion, the access lines coupled to a plurality of memory cells and control circuitry, wherein the control circuitry is configured to:

perform a read or write operation; and

equalize potential of access lines after the read or write operation is performed,

wherein the access lines are coupled to the plurality of memory cells at least at the wide width portion of the access lines, and wherein the access lines are coupled to the control circuitry through ascending and descending interconnections coupled to top planar interconnections.

11. The apparatus of claim 10 , wherein the control circuitry is configured to discharge potential of equalized access lines to a ground reference potential.

12. The apparatus of claim 10 , wherein the control circuitry is configured to equalize select gate lines of the memory array to the equalized potential of access lines after the read or write operation is performed.

13. The apparatus of claim 12 , wherein the control circuitry is configured to discharge potential of select gate lines to a ground reference potential.

14. A method of operating a memory, comprising:

performing a read operation or a program operation;

equalizing potential of access lines for a block of a memory array after the read operation or the program operation is completed,

wherein the memory is a three dimensional memory array including a stack of conductive lines with a wide width portion and a narrow width portion, the narrow width portion having a stair step structure.

15. The method of claim 14 , wherein the stack of conductive lines is coupled to circuitry below the memory array through top planar interconnections coupled between ascending interconnections and descending interconnections, the top planar interconnections have a longest dimension in a direction different from a direction of a longest dimension of the conductive lines.

16. The method of claim 14 , further comprising discharging the equalized access lines of the block of memory array to a ground reference potential.

17. The method of claim 16 , further comprising discharging select gate lines of the block of memory array to a ground reference potential.

18. The method of claim 14 , further comprising discharging the equalized access lines of the block of memory array to a potential different than a ground reference potential.

19. The method of claim 17 , wherein discharging select gate lines includes coupling select gate lines to access lines.

20. The method of claim 14 , comprising biasing potential of select gate lines to a potential different than the potential of equalized access lines.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 30, 2015
From: TANZAWA, TORU
To: MICRON TECHNOLOGY, INC.
Reel/Frame 036218/0575 →
Continuity (2)
Division 13774522 · Feb 22, 2013
Related Publication 20150340095A1 · Nov 26, 2015