Molybdenum containing targets for touch screen device
View Patent ↗The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of titanium, and a third metal element of chromium or tantalum, and deposited films prepared by the sputter targets. In a preferred aspect of the invention, the sputter target includes a phase that is rich in molybdenum, a phase that is rich in titanium, and a phase that is rich in the third metal element.
1. A touch screen device comprising:
a substrate layer;
a conductive layer; and
a film layer including:
i) about 50 atomic % to 98 atomic % molybdenum, based on the total number of atoms in the film layer;
ii) 0.5 atomic % or more titanium, based on the total number of atoms in the film layer; and
iii) 0.5 atomic % or more of a third metal element, based on the total number of atoms in the film layer, wherein the third metal element is tantalum or chromium.
2. The touch screen device according to claim 1 , wherein the film layer has a thickness less than 200 nm and is interposed between the substrate layer and a conductive layer.
3. The touch screen device according to claim 2 , wherein the concentration of molybdenum in the film layer is 75 atomic % to 98 atomic %.
4. The touch screen device according to claim 3 , wherein the film layer has a thickness of 10 nm to 100 nm.
5. The touch screen device according to claim 4 , wherein the substrate layer includes a layer of a glass.
6. The touch screen device according to claim 5 , wherein the conductive layer consists essentially of Cu, Al, Ag, or Au.
7. The touch screen device according to claim 6 , wherein the third metal element is chromium.
8. The touch screen device according to claim 5 , wherein the film layer has a thickness less than 50 nm.
9. The touch screen device according to claim 8 , wherein the concentration of titanium in the film layer is 20 atomic % or less.
10. The touch screen device according to claim 9 , wherein the third metal element is tantalum and wherein the concentration of tantalum in the film layer is 20 atomic % or less.
11. The touch screen device according to claim 10 , wherein the concentration of titanium in the film layer is about 1 atomic % to 10 atomic %.
12. The touch screen device according to claim 11 , wherein the concentration of tantalum in the film layer is about 1 atomic % to 10 atomic %.
13. The touch screen device according to claim 8 , wherein the third metal element is tantalum and wherein the total concentration of the tantalum and the titanium is 25 atomic percent or less.
14. A touch screen device comprising:
i) a film layer, wherein the film layer includes 75 atomic % to 98 atomic % molybdenum; 0.5 atomic % to 10 atomic % titanium; and 0.5 atomic % to 10 atomic % tantalum;
ii) a substrate layer of a glass; and
iii) a conductive layer;
wherein the film layer is interposed between the substrate layer and a conductive layer; the film layer has a thickness of 10 nm or more and less than 200 nm.
15. The touch screen device according to claim 14 , wherein the conductive layer consists essentially of Cu, Al, Ag, or Au.
16. The touch screen device of claim 14 , wherein the film layer has a thickness of less than 50 nm.
17. A method for manufacturing a touch screen device comprising the steps of:
i) providing a glass substrate;
ii) depositing a molybdenum alloy layer over the glass substrate;
iii) etching the molybdenum alloy layer; and
iv) depositing a conductive layer over the molybdenum layer;
wherein the molybdenum alloy layer is deposited by sputtering a sputter target including molybdenum, titanium, and a third metal element that is tantalum or chromium;
wherein the alloy layer includes 50 atomic % to 98 atomic % molybdenum; 0.5 atomic % or more titanium; and 0.5 atomic % or more of tantalum or chromium.
18. The method of claim 17 , wherein the molybdenum alloy layer is etched at a rate of less than about 65 nm/min.
19. The method of claim 17 , wherein the method includes removing an oxide layer from the sputter target.
20. The method of claim 17 , wherein the concentration of molybdenum in the molybdenum alloy layer is 75 atomic % to 98 atomic %; the concentration of titanium in the molybdenum alloy layer is about 1 atomic % to 10 atomic %; and the concentration of chromium in the molybdenum alloy layer is about 1 atomic % to 10 atomic %.
21. The method of claim 20 , wherein molybdenum alloy layer has a grain size of about 10 nm to about 200 nm, and the sputter target has a density of about 96% or more of the theoretical density.