Manufacturing method of semiconductor device, and semiconductor device
Provided is a semiconductor device that suppresses the occurrence of defects due to photocorrosion. A method for manufacturing the semiconductor device includes the steps of: forming an insulating layer with a concave portion over a substrate; forming a conductive film over the insulating film and the inside of the concave portion; polishing and removing the conductive film positioned over the insulating layer; and cleaning the insulating layer in a light-shielded state. Between the step of polishing and the step of cleaning, or after the step of cleaning, the substrate SUB is moved by detecting the presence or absence of the substrate SUB in the light-shielded state using an infrared sensor.
1. A method for manufacturing a semiconductor device by using a semiconductor manufacturing apparatus, comprising steps of:
(a) forming a first wiring over a semiconductor substrate;
(b) forming an insulating film over the first wiring;
(c) forming, in the insulating film, a hole connected to the first wiring and a trench connected to the hole;
(d) forming a conductive film over the insulating film in order to fill in the hole and the trench;
(e) polishing the conductive film outside the hole and the trench, thereby a second wiring is formed in the trench and a via is formed in the hole; and
(f) cleaning surfaces of the insulating film and the second wiring,
wherein the step (e) is performed in a polishing chamber of the semiconductor manufacturing apparatus,
wherein the step (f) is performed in a cleaning chamber of the semiconductor manufacturing apparatus,
wherein, while the semiconductor substrate is moved from the polishing chamber to the cleaning chamber, the presence of the semiconductor substrate is confirmed by using an ultrasonic sensor, and
wherein the steps (e) and (f) are performed in a light-shielded state.
2. A method for manufacturing a semiconductor device according to claim 1 , wherein the conductive film includes a metal film and a barrier metal film,
wherein the polishing chamber includes a first polishing chamber and a second polishing chamber,
wherein the metal film is polished in the first polishing chamber, and
wherein the barrier metal film is polished in the second polishing chamber.
3. A method for manufacturing a semiconductor device according to claim 2 , wherein the metal film is a Cu film.
4. A method for manufacturing a semiconductor device according to claim 1 , wherein the step (f) is performed by using pure water.
5. A method for manufacturing a semiconductor device by using a semiconductor manufacturing apparatus, comprising steps of:
(a) forming a first wiring over a semiconductor substrate;
(b) forming an insulating film over the first wiring;
(c) forming, in the insulating film, a hole connected to the first wiring and a trench connected to the hole;
(d) forming a conductive film over the insulating film in order to fill in the hole and the trench;
(e) polishing the conductive film outside the hole and the trench, thereby a second wiring is formed in the trench and a via is formed in the hole; and
(f) cleaning surfaces of the insulating film and the second wiring,
wherein the step (e) is performed in a polishing chamber of the semiconductor manufacturing apparatus,
wherein the step (f) is performed in a cleaning chamber of the semiconductor manufacturing apparatus, and
wherein, while the semiconductor substrate is moved from the polishing chamber to the cleaning chamber, the presence of the semiconductor substrate is confirmed by using an ultrasonic sensor,
wherein the conductive film includes a metal film and a barrier metal film,
wherein the polishing chamber includes a first polishing chamber and a second polishing chamber,
wherein the metal film is polished in the first polishing chamber, and
wherein the barrier metal film is polished in the second polishing chamber.
6. A method of manufacturing a semiconductor device according to claim 5 , wherein the metal film is a Cu film.
7. A method of manufacturing a semiconductor device according to claim 5 , wherein the step (f) is performed by using pure water.