Electrical bar latching for low stiffness flexure MEMS actuator
A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.
1. A MEMS actuator comprising:
an inner frame;
an outer frame comprising a plurality of latched electrical bars, wherein a first of the plurality of latched bars comprises a latch protrusion secured to a corresponding latch groove of a second of the plurality of latched bars; and
a plurality of buckled flexures coupling the inner frame to the outer frame.
2. The MEMS actuator of claim 1 , wherein the plurality of buckled flexures electrically and mechanically couple the inner frame to the outer frame.
3. The MEMS actuator of claim 1 , wherein the plurality of latched electrical bars consists of the first and the second latched bars, each of the first and second latched bars coupled to the inner frame by a corresponding plurality of buckled flexures, and wherein the first latched bar comprises a plurality of latch protrusions secured to a corresponding plurality of latch grooves of the second latched bar.
4. The MEMS actuator of claim 1 , wherein the plurality of latched electrical bars comprise four latched electrical bars, and wherein each of the four electrical bars is coupled to the inner frame by a corresponding plurality of buckled flexures.
5. The MEMS actuator of claim 4 , wherein the first of the plurality of latched electrical bars comprises a second latch protrusion secured to a corresponding latch groove of a third of the plurality of the latched bars.
6. The MEMS actuator of claim 5 , wherein the second of the plurality of latched electrical bars comprises a second latch groove secured to a corresponding latch protrusion of a fourth of the plurality of the latched bars.
7. The MEMS actuator of claim 6 , wherein the third of the plurality of latched bars comprises a second latch groove secured to a second latch protrusion of the fourth of the plurality of latched bars.
8. The MEMS actuator of claim 1 , wherein each of the plurality of flexures includes a first end connected to a first frame, a second end connected to a second frame, and a buckled section connecting the first end to the second end.
9. The MEMS actuator of claim 8 , wherein each of the plurality of flexures is 10 to 30 micrometers wide and 1 to 3 micrometers thick.
10. The MEMS actuator of claim 1 , wherein the MEMS actuator is mounted in a cutout of a circuit board.
11. An image sensor package, comprising:
a circuit board;
a MEMS actuator mounted in a cutout of the circuit board, and comprising:
an inner frame;
an outer frame comprising a plurality of latched electrical bars, wherein a first of the plurality of latched bars comprises a latch protrusion secured to a corresponding latch groove of a second of the plurality of latched bars; and
a plurality of buckled flexures coupling the inner frame to the outer frame; and
an image sensor mounted on the MEMS actuator.
12. The image sensor package of claim 11 , wherein the plurality of latched electrical bars consists of the first and the second latched bars, each of the first and second latched bars coupled to the inner frame by a corresponding plurality of buckled flexures, and wherein the first latched bar comprises a plurality of latch protrusions secured to a corresponding plurality of latch grooves of the second latched bar.
13. The image sensor package of claim 11 , wherein the plurality of latched electrical bars comprise four latched electrical bars, and wherein each of the four electrical bars is coupled to the inner frame by a corresponding plurality of buckled flexures.
14. The image sensor package of claim 13 , wherein the first of the plurality of latched electrical bars comprises a second latch protrusion secured to a corresponding latch groove of a third of the plurality of the latched bars.
15. The image sensor package of claim 14 , wherein the second of the plurality of latched electrical bars comprises a second latch groove secured to a corresponding latch protrusion of a fourth of the plurality of the latched bars.
16. The image sensor package of claim 15 , wherein the third of the plurality of latched bars comprises a second latch groove secured to a second latch protrusion of the fourth of the plurality of latched bars.