Zener diode having a polysilicon layer for improved reverse surge capability and decreased leakage current
View Patent ↗A semiconductor device such as a Zener diode includes a first semiconductor material of a first conductivity type and a second semiconductor material of a second conductivity type in contact with the first semiconductor material to form a junction therebetween. A first oxide layer is disposed over a portion of the second semiconductor material such that a remaining portion of the second semiconductor material is exposed. A polysilicon layer is disposed on the exposed portion of the second semiconductor material and a portion of the first oxide layer. A first conductive layer is disposed on the polysilicon layer. A second conductive layer is disposed on a surface of the first semiconductor material opposing a surface of the first semiconductor material in contact with the second semiconductor material.
1. A method of fabricating a semiconductor device, comprising:
forming a first oxide layer over a portion of a semiconductor substrate formed from a first semiconductor material having a first conductivity type such that a remaining portion of the semiconductor substrate is exposed;
forming a protective layer on a first surface of the semiconductor substrate and the first oxide layer;
introducing a dopant of the second conductivity type into the semiconductor substrate through the protective layer to form a junction layer that defines a junction with the semiconductor substrate;
forming a first conductive layer over the junction layer; and
forming a second conductive layer on a second surface of the semiconductor substrate opposing the first surface of the semiconductor substrate.
2. The method of claim 1 wherein the protective layer comprises a conductive material.
3. The method of claim 2 wherein the protective layer comprises polysilicon.
4. The method of claim 1 further comprising removing the protective layer after introducing the dopant of the second conductivity type.
5. The method of claim 4 wherein the protective layer comprises a non-conductive material.
6. The method of claim 1 further comprising diffusing the dopant implanted in the semiconductor substrate at an elevated temperature.
7. The method of claim 1 wherein the dopant is introduced into the semiconductor substrate by ion implantation.