Packaged semiconductor components having substantially rigid support members and methods of packaging semiconductor components
Packaged semiconductor components having substantially rigid support member are disclosed. The packages can include a semiconductor die and a support member proximate to the semiconductor die. The support member is at least substantially rigid. The packages can further include an adhesive between the support member and the semiconductor die and adhesively attaching the support member to the semiconductor die. The packages can also include a substrate carrying the semiconductor die and the support member attached to the semiconductor die.
1. A method for processing a semiconductor wafer, comprising:
attaching a support structure to the semiconductor wafer;
cutting the semiconductor wafer and the support structure into individual semiconductor dies with attached individual support members that are portions of the support structure, wherein individual support members include a first plate, a second plate, and a plurality of heat conducting fins between the first and second plates;
attaching a substrate to at least one support member, the substrate having a connection site for electrically connecting the substrate to the semiconductor die; and
at least partially encapsulating the semiconductor die, the support member, and the substrate in an encapsulant.
2. The method of claim 1 wherein the support member includes at least one of a metal, a metal alloy, ceramics, polymers, and glass.
3. The method of claim 1 wherein the support member is a laminated structure having one at least substantially rigid layer.
4. The method of claim 1 , further comprising removing material from a surface of the semiconductor wafer.
5. The method of claim 1 , further comprising pre-forming the support structure and an adhesive into a die attach film, and wherein attaching a support structure includes attaching the die attach film with the adhesive facing the semiconductor wafer.
6. The method of claim 1 wherein the support structure reduces flexing of the semiconductor wafer during cutting the semiconductor wafer.
7. The method of claim 1 wherein the support member has a heat conductivity sufficient to at least partially equalize heat transfer from the semiconductor die during operation.
8. The method of claim 1 wherein the semiconductor die is a first semiconductor die, and wherein the substrate includes a second semiconductor die.
9. The method of claim 8 , further comprising attaching a first wirebond to the first semiconductor die and attaching a second wirebond to the second semiconductor die.
10. A method for processing a semiconductor wafer, comprising:
attaching a support structure to the semiconductor wafer;
cutting the semiconductor wafer and the support structure into individual semiconductor dies with attached individual support members that are portions of the support structure, wherein individual support members include a first plate, a second plate, and a plurality of heat conducting fins between the first and second plates;
attaching a substrate to the semiconductor die; and
at least partially encapsulating the semiconductor die, the support member, and the substrate in an encapsulant.
11. The method of claim 10 wherein the semiconductor die is attached to the substrate with a plurality of internal solder balls.
12. The method of claim 10 wherein the semiconductor die is attached to a first surface of the substrate, the method further comprising attaching a plurality of external solder balls to a second surface of the substrate, wherein the second surface of the substrate is opposite from the first surface of the substrate.
13. The method of claim 10 wherein the support member is a laminated structure having at least one substantially rigid layer.
14. A method for assembling a packaged semiconductor component, comprising:
attaching a semiconductor die having a support member to a substrate, wherein the support member includes a first plate, a second plate, and a plurality of heat conducting fins between the first and second plates;
electrically connecting individual bond pads at the semiconductor die to individual connection sites at the substrate; and
encasing the semiconductor die and the support member in an encapsulant.
15. The method of claim 14 wherein the support member is attached to the semiconductor die with a first adhesive, and wherein the support member is attached to the substrate with a second adhesive.
16. The method of claim 15 wherein the semiconductor die is a first semiconductor die, and wherein the substrate is a second semiconductor die.
17. The method of claim 16 , further comprising wirebonding the first semiconductor die and the second semiconductor die to the substrate.
18. The method of claim 15 , further comprising wirebonding the semiconductor die to the substrate.
19. The method of claim 15 wherein the support member has an opening, the method further comprising extending a plurality of wirebonds from bond pads of the semiconductor die to connection sites of the substrate through the opening in the support member.
20. The method of claim 14 wherein the semiconductor die is a first semiconductor die, the method further comprising attaching a second semiconductor die to the support member opposite the first semiconductor die.
21. The method of claim 14 wherein the support member comprises slots, channels, or apertures between adjacent heat conducting fins.
22. The method of claim 14 , further comprising pre-forming the support member from a laminated structure having at least one substantially rigid layer and an adhesive at a surface of the laminated structure.