Semiconductor structure with self-aligned spacers and method of fabricating the same
A method of fabricating a semiconductor with self-aligned spacer includes providing a substrate. At least two gate structures are disposed on the substrate. The substrate between two gate structures is exposed. A silicon oxide layer is formed to cover the exposed substrate. A nitride-containing material layer covers each gate structure and silicon oxide layer. Later, the nitride-containing material layer is etched to form a first self-aligned spacer on a sidewall of each gate structure and part of the silicon oxide layer is exposed, wherein the sidewalls are opposed to each other. Then, the exposed silicon oxide layer is removed to form a second self-aligned spacer. The first self-aligned spacer and the second self-aligned spacer cooperatively define a recess on the substrate. Finally, a contact plug is formed in the recess.
1. A semiconductor structure with self-aligned spacers, comprising:
a substrate;
a first gate structure and a second gate structure disposed on the substrate;
a cap layer disposed on the first gate structure;
a spacer contacting the cap layer and the first gate structure;
a dielectric layer disposed on and contacting the cap layer and the spacer;
composite self-aligned spacers respectively disposed on a sidewall of the first gate structure and a sidewall of the second gate structure, wherein the composite self-aligned spacer on the first gate structure contacts the dielectric layer, the sidewall of the first gate structure and the sidewall of the second gate structure are opposed to each other, each of the composite self-aligned spacers comprises a nitride-containing material layer and a silicon oxide layer, and the silicon oxide layer is disposed between the substrate and the nitride-containing material layer; and
a contact plug disposed between the composite self-aligned spacers and the contact plug contacting the composite self-aligned spacers.
2. The semiconductor structure with self-aligned spacers of claim 1 , wherein the entire silicon oxide layer has a trapezoid-shaped cross section.
3. The semiconductor structure with self-aligned spacers of claim 1 , wherein the entire silicon oxide layer has an L-shaped cross section.
4. The semiconductor structure with self-aligned spacers of claim 3 , wherein the silicon oxide layer is disposed between the substrate and the nitride-containing material layer, and is disposed between each gate structure and the nitride-containing material layer.
5. The semiconductor structure with self-aligned spacers of claim 1 , wherein the nitride-containing material layer comprises silicon nitride, silicon carbonitride or silicon oxycarbonitride.
6. The semiconductor structure with self-aligned spacers of claim 1 , wherein the substrate comprises a fin structure or a planar silicon substrate.
7. The semiconductor structure with self-aligned spacers of claim 1 , wherein the substrate between the first gate structure and the second gate structure comprises an epitaxial layer or a doping region.
8. The semiconductor structure with self-aligned spacers of claim 1 , wherein a first width of the dielectric layer is larger than a second width of the cap layer, and the first width, the second width and a top surface of the substrate are parallel.