IP Library Granted Patent US 9,449,851
Granted Patent B2
US 9,449,851 · App. 14/833,407 · Granted Sep 20, 2016

Local doping of two-dimensional materials

Inventors: Dillon Wong (Alameda, CA); Jairo Velasco, Jr. (Berkeley, CA); Long Ju (Berkeley, CA); Salman Kahn (Tracy, CA); Juwon Lee (Berkeley, CA); Chad E. Germany (Richmond, CA); Alexander K. Zettl (Kensington, CA); Feng Wang (Fremont, CA); Michael F. Crommie (Oakland, CA)
Assignee: The Regents of the University of California
H01L21/326H01L21/2254H01L21/2256H01L21/479H01L29/1606H01L21/02381H01L21/02488H01L21/02502H01L21/02527H01L21/02568
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Quick Facts
Patent No.
US 9,449,851
App. No.
14/833,407
Granted
Sep 20, 2016
Kind
B2
Abstract

This disclosure provides systems, methods, and apparatus related to locally doping two-dimensional (2D) materials. In one aspect, an assembly including a substrate, a first insulator disposed on the substrate, a second insulator disposed on the first insulator, and a 2D material disposed on the second insulator is formed. A first voltage is applied between the 2D material and the substrate. With the first voltage applied between the 2D material and the substrate, a second voltage is applied between the 2D material and a probe positioned proximate the 2D material. The second voltage between the 2D material and the probe is removed. The first voltage between the 2D material and the substrate is removed. A portion of the 2D material proximate the probe when the second voltage was applied has a different electron density compared to a remainder of the 2D material.

Claims (23)

1. A method comprising:

(a) forming an assembly including a substrate, a first insulator disposed on the substrate, a second insulator disposed on the first insulator, and a two-dimensional (2D) material disposed on the second insulator;

(b) applying a first voltage between the 2D material and the substrate;

(c) with the first voltage applied between the 2D material and the substrate, applying a second voltage between the 2D material and a probe positioned proximate the 2D material;

(d) removing the second voltage between the 2D material and the probe; and

(e) removing the first voltage between the 2D material and the substrate, a portion of the 2D material proximate the probe in operation (c) having a different electron density compared to a remainder of the 2D material.

2. The method of claim 1 , wherein the 2D material comprise about 10 monolayers of material or less.

3. The method of claim 1 , wherein the 2D material comprises graphene.

4. The method of claim 1 , wherein the 2D material is selected from a group consisting of molybdenum disulfide, molybdenum diselenide, tungsten disulfide, and tungsten diselenide.

5. The method of claim 1 , wherein the probe is positioned about 10 nanometers or less from the 2D material in operation (c).

6. The method of claim 1 , wherein the second voltage applied between the 2D material and the probe in operation (c) is about −100 volts to +100 volts.

7. The method of claim 1 , wherein the second voltage applied between the 2D material and the probe in operation (c) is about +5 volts or higher.

8. The method of claim 1 , wherein the second voltage applied between the 2D material and the probe in operation (c) is about −3 volts or lower.

9. The method of claim 1 , wherein the second voltage applied between the 2D material and the probe in operation (c) is applied for about 0.1 seconds to 5 minutes.

10. The method of claim 1 , wherein the first voltage applied between the 2D material and the substrate in operation (b) is about −150 volts to about +150 volts.

11. The method of claim 1 , wherein the first insulator comprises a material selected from a group consisting of silicon oxide, hafnium oxide, and aluminum oxide, wherein the second insulator comprises a material selected from a group consisting of boron nitride and a silicate mineral, and wherein the substrate comprises a material selected from a group consisting of a doped semiconductor, a layered semimetal, and a metal.

12. The method of claim 1 , wherein the first insulator has a greater band gap than the second insulator.

13. The method of claim 1 , wherein the probe comprises a conductive material.

14. The method of claim 1 , wherein the probe comprises a metal wire or a carbon nanotube.

15. The method of claim 1 , wherein the probe comprises a conductive substrate and a pattern disposed on a surface the conductive substrate comprising a conductive material.

16. The method of claim 1 , wherein the first insulator is about 10 nanometers to 500 nanometers thick.

17. The method of claim 1 , wherein the second insulator is about 5 nanometers to 300 nanometers thick.

18. The method of claim 1 , wherein the substrate has a thickness of about 50 nanometers or greater.

Assignments (3)
CONFIRMATORY LICENSE Recorded May 14, 2018
From: UNIVERSITY OF CALIF-LAWRENC BERKELEY LAB
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 045797/0468 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 10, 2016
From: WONG, DILLON; VELASCO, JAIRO, JR; JU, LONG; KAHN, SALMAN; LEE, JUWON; GERMANY, CHAD E.; ZETTL, ALEXANDER K.; WANG, FENG; CROMMIE, MICHAEL F.
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 037697/0371 →
CONFIRMATORY LICENSE Recorded Jan 15, 2016
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 037546/0163 →
Continuity (2)
Provisional Application 62043672 · Aug 29, 2014
Related Publication 20160064249A1 · Mar 3, 2016