Semiconductor device and method of manufacturing the same
According to one embodiment, a method of manufacturing a semiconductor device, includes forming an energy-ray-curable resin layer containing a sensitizer for increasing sensitivity to exposure light, on an underlayer region including a semiconductor substrate, irradiating the energy-ray-curable resin layer with energy rays to form a lower layer film containing the sensitizer, forming a resist film on the lower layer film, diffusing the sensitizer from the lower layer film into the resist film by thermal treatment, irradiating the resist film in which the sensitizer is diffused with exposure light, and developing the resist film irradiated with the exposure light.
1. A method of manufacturing a semiconductor device, the method comprising:
forming an energy-ray-curable resin layer containing a sensitizer for increasing sensitivity to exposure light, on an underlayer region including a semiconductor substrate;
curing the energy-ray-curable resin layer by irradiating the energy-ray-curable resin layer with energy rays to form a lower layer film containing the sensitizer from the energy-ray-curable resin layer;
forming a resist film on the lower layer film;
diffusing the sensitizer from the lower layer film into the resist film by thermal treatment;
irradiating the resist film in which the sensitizer is diffused with exposure light; and
developing the resist film irradiated with the exposure light.
2. The method of claim 1 , wherein
concentration of the sensitizer diffused into the resist film is increased from an upper surface toward a lower surface of the resist film.
3. The method of claim 1 , wherein
an amount per unit depth of the exposure light absorbed by the resist film in which the sensitizer is diffused is uniformed in a depth direction.
4. The method of claim 1 , wherein
the sensitizer generates secondary electrons by absorbing the exposure light, and
the resist film contains an acid generator which generates acid with energy of the secondary electrons.
5. The method of claim 1 , wherein
the energy-ray-curable resin layer is formed of a resin containing both the sensitizer and a mixture of a photocationic polymerization initiator and a polymerizable compound containing a reactive group capable of cationic polymerization.
6. The method of claim 1 , wherein
the energy-ray-curable resin layer is formed of a resin containing both the sensitizer and a mixture of a photoradical polymerization initiator and a polymerizable compound containing an ethylenic unsaturated bond capable of radical polymerization.
7. The method of claim 1 , wherein
the energy-ray-curable resin layer is formed of a resin containing both the sensitizer and a mixture of a photocationic polymerization initiator or photoradical polymerization initiator and an energy-ray-polymerizable compound containing an oxide as a main component.
8. The method of claim 1 , wherein
the exposure light is EUV light.
9. The method of claim 1 , wherein
the energy rays are light or electron beams.
10. The method of claim 1 , wherein
the sensitizer is an iodine compound.