IP Library Granted Patent US 9,716,028
Granted Patent B2
US 9,716,028 · App. 14/840,001 · Granted Jul 25, 2017

Universal clamping fixture to maintain laminate flatness during chip join

Inventors: Donald A. Merte (Poughkeepsie, NY); Thomas Weiss (Poughkeepsie, NY)
Assignee: International Business Machines Corporation
H01L21/68721B23Q3/061H01L21/68728H01L21/68778H01L24/75H01L2224/75704Y10T29/49826Y10T29/49842Y10T29/49998Y10T29/50
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Quick Facts
Patent No.
US 9,716,028
App. No.
14/840,001
Granted
Jul 25, 2017
Kind
B2
Abstract

A clamping apparatus and method for maintaining a workpiece flatness during processing includes a base having a planar surface for receiving a first workpiece. Two sets of opposing clamping mechanisms are mounted to the base and include a clamp head at a distal end of a rod extending from a housing in removable overlapping relation to the first workpiece. Each set of the clamp heads are in opposing spaced relationship to each other defining a second workpiece area, and the clamp heads are configured to mate with a top surface of the first workpiece. A biasing member is coupled to each of the housings and apply a downward vertical force to the housings, rods, and the clamp heads for applying a downward vertical pressure to the first workpiece. The first workpiece is thereby discouraged from thermally expanding in a vertical direction and is thermally expandable horizontally along the planar surface.

Claims (5)

1. A method of manufacturing a clamping apparatus for maintaining a workpiece flatness during processing, comprising:

mounting two sets of clamping mechanisms on a base and each clamping mechanism including a clamp head at a distal end of a rod extending from a housing configured to be in overlapping relation to a first workpiece, each set of the clamp heads extending below the rod, and being in spaced relationship to each other defining a second workpiece area for a second workpiece, and the clamp heads being configured to mate with a top surface of the first workpiece; and

coupling a biasing member including a spring washer to each of the housings, the biasing members communicating with the rods via the housings and applying a downward vertical force to the housings and rods and therethrough the clamp heads for applying a downward vertical pressure transmitted only by the clamp heads to the first workpiece such that the first workpiece is discouraged to thermally expand in a vertical direction with respect to a horizontal plane; and

wherein the mounting two sets of clamping mechanisms on the base comprises:

positioning a shaft integral to each housing through the base from a top side of the base.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 4, 2020
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: ELPIS TECHNOLOGIES INC.
Reel/Frame 052561/0161 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 30, 2015
From: MERTE, DONALD A.; WEISS, THOMAS
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 036454/0247 →
Continuity (2)
Division 13777229 · Feb 26, 2013
Related Publication 20150371887A1 · Dec 24, 2015