IP Library Granted Patent US 9,735,041
Granted Patent B2
US 9,735,041 · App. 14/840,004 · Granted Aug 15, 2017

Universal clamping fixture to maintain laminate flatness during chip join

Inventors: Donald A. Merte (Poughkeepsie, NY); Thomas Weiss (Poughkeepsie, NY)
Assignee: International Business Machines Corporation
H01L21/68721B23Q3/061H01L21/68728H01L21/68778H01L24/75H01L2224/75704Y10T29/49826Y10T29/49842Y10T29/49998Y10T29/50
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Quick Facts
Patent No.
US 9,735,041
App. No.
14/840,004
Granted
Aug 15, 2017
Kind
B2
Abstract

A clamping apparatus and method for maintaining a workpiece flatness during processing includes a base having a planar surface for receiving a first workpiece. Two sets of opposing clamping mechanisms are mounted to the base and include a clamp head at a distal end of a rod extending from a housing in removable overlapping relation to the first workpiece. Each set of the clamp heads are in opposing spaced relationship to each other defining a second workpiece area, and the clamp heads are configured to mate with a top surface of the first workpiece. A biasing member is coupled to each of the housings and apply a downward vertical force to the housings, rods, and the clamp heads for applying a downward vertical pressure to the first workpiece. The first workpiece is thereby discouraged from thermally expanding in a vertical direction and is thermally expandable horizontally along the planar surface.

Claims (4)

1. A method for maintaining a workpiece flatness during processing, comprising:

receiving a first workpiece on a base having a planar surface;

positioning a second workpiece between two clamping mechanisms mounted to the base and each clamping mechanism including a clamp head at a distal end of a rod extending from a housing configured to be in overlapping relation to the first workpiece, wherein the second workpiece comprises a die, each of the clamp heads extending below the rod, and being in spaced relationship to each other defining a second workpiece area for receiving the second workpiece, and the clamp heads being configured to mate with a top surface of the first workpiece and wherein each clamp head is located along an edge of the die; and

applying a downward vertical pressure to the first workpiece using a biasing member including a spring washer coupled to each of the housings, the biasing member communicating with the rods via the housings wherein the downward vertical pressure is transmitted only by the clamp heads via the housings and rods such that the first workpiece is discouraged to thermally expand in a vertical direction with respect to a horizontal plane defined by the planar surface and is thermally expandable along the horizontal plane.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 4, 2020
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: ELPIS TECHNOLOGIES INC.
Reel/Frame 052561/0161 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 30, 2015
From: MERTE, DONALD A.; WEISS, THOMAS
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 036454/0276 →
Continuity (2)
Division 13777229 · Feb 26, 2013
Related Publication 20150371888A1 · Dec 24, 2015