IR PLANAR ANTENNA-COUPLED METAL-INSULATOR-METAL RECTIFIER
A planar fixed area thin film antenna-coupled metal-insulator-metal (MIM) rectifier of arbitray metal with a native nickel oxide insulator. Devices can be designed for millimeter wave, IR, NIR and visible wavelengths.
1 . A method for fabricating a metal-insulator-metal diode comprising:
depositing a bottom metal layer; forming a native oxide on the metal depositing an insulation layer on the bottom oxidized metal layer;
forming a conductive post disposed within and exposed above the insulator layer; and
depositing a top metal layer.
2 . The method of claim 1 additionally comprising:
etching an opening in the insulator layer; and
depositing the post within the opening.
3 . The method of claim 2 wherein the step of etching an opening etches a tapered trench.
4 . The method of claim 3 wherein the resulting metal-oxide-metal stack is geometrically asymmetric in a horizontal plane.