Semiconductor memory device having memory cells provided in a height direction
View Patent ↗According to an embodiment, a semiconductor memory device comprises: a memory string comprising a plurality of memory cells connected in series therein; and a contact electrically connected to one end of the memory string. The memory string comprises a plurality of control gate electrodes, and a semiconductor layer. The contact comprises a contact layer, the contact layer having a plate-like shape whose longer direction is a first direction parallel to the substrate, and the contact layer having its lower surface electrically connected to the one end of the semiconductor layer. Moreover, the contact layer includes a metal layer, a silicon based layer, and a second conductive layer. The metal layer includes tungsten. The silicon based layer includes a material including silicon. The second conductive layer covers side surfaces of the metal layer and the silicon based layer.
1. A semiconductor memory device, comprising:
a memory string comprising a plurality of memory cells connected in series therein;
a first wiring electrically connected to one end of the memory string; and
a contact electrically connected between the memory string and the first wiring,
the memory string comprising:
a plurality of control gate electrodes as first conductive layers stacked above a substrate; and
a semiconductor layer having one end electrically connected to the contact and having as its longer direction a direction perpendicular to the substrate, the semiconductor layer facing the plurality of control gate electrodes, and
the contact comprising a contact layer, the contact layer having a plate-like shape whose longer direction is a first direction parallel to the substrate, and the contact layer having its lower surface electrically connected to the one end of the semiconductor layer, and
the contact layer comprising:
a metal layer that includes tungsten;
a silicon based layer that includes a material including silicon; and
a second conductive layer that covers side surfaces of the metal layer and the silicon based layer.
2. The semiconductor memory device according to claim 1 , wherein
the metal layer has the first direction as its longer direction, and
the second conductive layer covers both side surfaces in a second direction intersecting the first direction, of the metal layer and the silicon based layer.
3. The semiconductor memory device according to claim 2 , wherein
the contact layer further comprises a third conductive layer provided between the metal layer and the silicon based layer.
4. The semiconductor memory device according to claim 3 , wherein
the silicon based layer is positioned below the metal layer.
5. The semiconductor memory device according to claim 3 , wherein
the silicon based layer comprises a pair of separated portions that are separate in the second direction,
the metal layer is positioned between the pair of separated portions of the silicon based layer, and
the third conductive layer is positioned between the separated portion of the silicon based layer and the metal layer.
6. The semiconductor memory device according to claim 3 , wherein
one of the layers of the metal layer and the silicon based layer is positioned upper than the other of the layers,
the third conductive layer faces both side surfaces in the second direction and a lower surface of the one of the layers, and
the sum of film thicknesses of portions facing the both side surfaces in the second direction of the one of the layers, of the second conductive layer and the third conductive layer is larger than a film thickness of a portion facing both side surfaces of the other of the layers, of the second conductive layer.
7. The semiconductor memory device according to claim 4 , wherein
the silicon based layer comprises a pair of separated portions that are separate in the second direction,
the third conductive layer comprises:
a film portion that covers a side surface and a lower surface of the metal layer; and
a first protruding portion that protrudes downwardly and has the first direction as its longer direction, and
the first protruding portion of the third conductive layer is positioned between the pair of separated portions of the silicon based layer.
8. The semiconductor memory device according to claim 7 , wherein
the silicon based layer further comprises a connecting portion connected to the pair of separated portions, and
the connecting portion of the silicon based layer is positioned below the first protruding portion.
9. The semiconductor memory device according to claim 4 , wherein
the metal layer comprises:
a first lower surface; and
a second lower surface provided at a position closer to the substrate than the first lower surface, and
the metal layer is connected at its second lower surface to the second conductive layer, via the third conductive layer.
10. The semiconductor memory device according to claim 5 , wherein
the silicon based layer further comprises a connecting portion connected to the pair of separated portions, and
the connecting portion of the silicon based layer is positioned below the metal layer.
11. The semiconductor memory device according to claim 1 , wherein
the contact layer further comprises a fourth conductive layer which is positioned lower than the metal layer, the silicon based layer, and the second conductive layer, and which faces an upper surface of the substrate.
12. The semiconductor memory device according to claim 11 , wherein
the fourth conductive layer includes a metal silicide.
13. The semiconductor memory device according to claim 1 , wherein
the silicon based layer includes polysilicon or silicon oxide.
14. The semiconductor memory device according to claim 3 , wherein
at least one of the second conductive layer and the third conductive layer includes at least one of titanium and titanium nitride.
15. A semiconductor memory device, comprising:
a plurality of first conductive layers stacked above a substrate;
a semiconductor layer having as its longer direction a direction perpendicular to the substrate, the semiconductor layer facing the plurality of first conductive layers;
a contact layer having a plate-like shape whose longer direction is a first direction parallel to the substrate, the contact layer having its lower surface electrically connected to one end of the semiconductor layer; and
a first wiring electrically connected to the contact layer, and
the contact layer comprising:
a metal layer;
a silicon based layer that includes a material including silicon; and
a second conductive layer that covers side surfaces of the metal layer and the silicon based layer.
16. The semiconductor memory device according to claim 15 , wherein
the metal layer has the first direction as its longer direction, and
the second conductive layer covers both side surfaces in a second direction intersecting the first direction, of the metal layer and the silicon based layer.
17. The semiconductor memory device according to claim 15 , wherein
the contact layer further comprises a third conductive layer provided between the metal layer and the silicon based layer.
18. The semiconductor memory device according to claim 17 , wherein
the metal layer comprises:
a first lower surface; and
a second lower surface provided at a position closer to the substrate than the first lower surface, and
the metal layer is connected at its second lower surface to the second conductive layer, via the third conductive layer.
19. The semiconductor memory device according to claim 15 , wherein
the contact layer further comprises a fourth conductive layer which is positioned lower than the metal layer, the silicon based layer, and the second conductive layer, and which faces an upper surface of the substrate.
20. The semiconductor memory device according to claim 15 , wherein
the silicon based layer is positioned below the metal layer.