Method of forming a component having wire bonds and a stiffening layer
View Patent ↗Microelectronic components and methods forming such microelectronic components are disclosed herein. The microelectronic components may include a plurality of electrically conductive vias in the form of wire bonds extending from a bonding surface of a substrate, such as surfaces of electrically conductive elements at a surface of the substrate.
1. A method of forming a component, comprising:
forming a plurality of wire bonds, each having a first end bonded to a conductive element of a plurality of conductive elements at a surface of the component, wherein the wire bonds have second ends remote from the first ends, the wire bonds having lengths between their respective first and second ends;
forming a first layer covering a first portion of the length of each wire bond;
inserting the second ends of the wire bonds into a removable film;
then forming a second layer overlying the first layer and covering a second portion of the length of each wire bond; and
then removing the removable film from the wire bonds,
wherein the second ends of the wire bonds are uncovered by the second layer at a surface of the second layer above the first layer and remote from the first layer, and
wherein the first layer increases stiffness of the wire bonds.
2. The method of claim 1 , wherein the first and second layers have different material properties.
3. The method of claim 1 , wherein the forming of the first layer includes curing the first layer, and wherein the forming of the second layer occurs after the forming of the first layer.
4. The method of claim 3 , wherein the first layer is a stiffening layer and the second layer is an encapsulation.
5. The method of claim 1 , further comprising providing a raised region, prior to the forming of the first layer, such that the raised region at least partially contains a material of the first layer in at least one direction parallel to the surface of the component.
6. The method of claim 5 , wherein the raised region is made of a different material than the first layer and the second layer.
7. The method of claim 1 , wherein the removable film inhibits the second material from covering the second ends of the wire bonds.
8. The method of claim 1 , wherein the first layer inhibits movement of the second ends of the wire bonds during the forming of the second layer.
9. The method of claim 1 , wherein the first layer is made of a dielectric material.
10. The method of claim 9 , wherein the first layer is stiffer and made of a different material than the second layer.
11. The method of claim 1 , wherein the first layer covers at least 10% of the length of the wire bonds.
12. The method of claim 1 , wherein the first layer covers at least 50 micrometers of the length of the wire bonds.
13. The method of claim 1 , wherein each of the wire bonds is stitch bonded to one of the conductive elements.
14. The method of claim 1 , wherein the wire bonds have bonding tool marks thereon adjacent the second ends of the wire bonds.
15. The method of claim 14 , wherein the wire bonds are tapered in at least one direction adjacent the second ends of the wire bonds.
16. The method of claim 14 , wherein the bonding tool mark is a ball-shaped region.
17. The method of claim 1 , wherein the second ends of the wire bonds project away from the second layer at an angle of 65 to 90 degrees with respect to a plane defined by the surface of the second layer.