Semiconductor device including self-aligned gate structure and improved gate spacer topography
View Patent ↗A semiconductor device includes at least one semiconductor fin on an upper surface of a semiconductor substrate, and at least one metal gate stack formed on the upper surface of the semiconductor substrate. One or more pairs of source/drain contact structures are formed on the upper surface of the semiconductor fin. Each source/drain contact structure includes a metal contact stack, a spacer, and a cap spacer. The metal contact stack is formed on the upper surface of the fin. The spacer is interposed between a contact sidewall of the metal contact stack and a gate sidewall of the at least one metal gate stack. The cap spacer is formed on an upper surface of the metal contact stack and has a cap portion disposed against the spacer such that the metal gate stack is interposed between the opposing source/drain contact structures.
1. A semiconductor device, comprising:
at least one semiconductor fin on an upper surface of a semiconductor substrate;
at least one metal gate stack formed on the upper surface of the semiconductor substrate; and
at least one pair of opposing source/drain contact structures formed on the upper surface of the semiconductor fin, each source/drain contact structure comprising:
a metal contact stack atop the upper surface of the at least one fin;
a first spacer interposed between a contact sidewall of the metal contact stack and a gate sidewall of the at least one metal gate stack, and a second spacer opposite the first spacer, the second spacer interposed between the metal contact stack and a dielectric layer on a portion of the at least one fin; and
a cap spacer formed on an upper surface of the metal contact stack and having a cap portion including first and second opposing side portions extending perpendicularly from the cap spacer, the first side portion disposed against the first spacer and the second side portion disposed against the second spacer,
wherein the metal gate stack is interposed between the opposing source/drain contact structures.
2. The semiconductor device of claim 1 , wherein a first sidewall of the at least one metal gate stack is against the second spacer included with a first source/drain contact structure among the pair of opposing source/drain contact structures, and wherein a second sidewall of the at least one metal gate stack is against the second spacer included with a second source/drain contact structure among the pair of opposing source/drain contact structures.
3. The semiconductor device of claim 2 , wherein each source/drain contact structure includes a dielectric cap formed on an upper surface of the cap spacer such that a base portion of the cap spacer is interposed between the source/drain contact structure and the dielectric cap.
4. The semiconductor device of claim 3 , wherein the second side portion is interposed between the dielectric cap and the second spacer included with a respective source/drain contact structure.
5. The semiconductor device of claim 4 , wherein the at least one pair of opposing source/drain contact structures includes a pair of opposing NFET source/drain contact structures and a pair of opposing PFET source/drain contact structures, and
wherein the at least one pair of metal gate stack includes an NFET metal gate stack interposed between the NFET source/drain contact structures, and a PFET metal gate stack interposed between the PFET source/drain contact structures.
6. The semiconductor device of claim 5 , wherein the NFET source/drain contact structures includes a first conductive material doped with a first type of ions, and the PFET source/drain contact structures includes a second conductive material doped with a second type of ions different from the first type of ions.
7. The semiconductor device of claim 3 , wherein the dielectric cap is on an upper surface of the dielectric cap and between the first and second side portions of the cap spacer.