Self-rectifying resistive random access memory cell structure
A self-rectifying resistive random access memory (RRAM) cell structure is provided. The self-rectifying RRAM cell structure includes a first electrode. An insulator-metal-transition (IMT) material layer is disposed on the first electrode. A barrier layer is disposed on the IMT material layer. A second electrode is disposed on the barrier layer. The IMT material layer is separated from the second electrode by the barrier layer.
1. A self-rectifying resistive random access memory (RRAM) cell structure, comprising:
a first electrode;
an insulator-metal-transition (IMT) material layer disposed on the first electrode, wherein the first electrode is formed of a first metal element of one of Ti and Ta and the IMT material layer is formed of an oxide of the first metal element;
a barrier layer disposed on the IMT material layer; and
a second electrode disposed on the barrier layer, wherein the IMT material layer is separated from the second electrode by the barrier layer and the barrier layer directly contacts the second electrode and wherein the second electrode is formed of a second metal element selected from a group consisting of Ni, Zr, Nb, Y, Co, or Ge and the barrier layer is formed of an oxide of the second metal element.
2. The self-rectifying RRAM cell structure as claimed in claim 1 , wherein the IMT material layer is a single layer.
3. The self-rectifying RRAM cell structure as claimed in claim 1 , wherein the IMT material layer has a first surface and a second surface opposite each other that are in direct contact with the first electrode and the barrier layer, respectively.
4. The self-rectifying RRAM cell structure as claimed in claim 1 , wherein the IMT material layer and the first electrode form an ohmic contact.
5. The self-rectifying RRAM cell structure as claimed in claim 1 , wherein the barrier layer is separated from the first electrode by the IMT material layer.
6. The self-rectifying RRAM cell structure as claimed in claim 1 , wherein the barrier layer has a bandgap higher than 2 eV.
7. The self-rectifying RRAM cell structure as claimed in claim 1 , wherein the first electrode is electrically connected to ground, and the second electrode is electrically coupled to a positive or negative voltage.
8. The self-rectifying RRAM cell structure as claimed in claim 1 , wherein the self-rectifying RRAM cell structure is a bipolar RRAM cell structure.
9. The self-rectifying RRAM cell structure as claimed in claim 1 , wherein the barrier layer is directly disposed on the IMT material layer.