High voltage transistor
View Patent ↗High voltage devices and methods for forming a high voltage device are disclosed. The high voltage device includes a substrate prepared with a device isolation region. The device isolation region defines a device region. The device region includes at least first and second source/drain regions and a gate region defined thereon. A device well is disposed in the device region. The device well encompasses the at least first and second source/drain regions. A primary gate and at least one secondary gate adjacent to the primary gate are disposed in the gate region. The at least first and second source/drain regions are displaced from first and second sides of the primary gate.
1. A device comprising:
a substrate prepared with a device isolation region, the device isolation region defines a high voltage (HV) device region, wherein the HV device region comprises a gate region defined thereon;
a device well in the HV device region, wherein a first and a second heavily doped diffusion region are disposed within the device well;
a transistor gate disposed in the gate region and between the first and second heavily doped diffusion regions, wherein a first and a second sidewall of the transistor gate are each lined with an inter-poly dielectric layer;
at least one secondary gate disposed on the substrate in the gate region and adjacent to the transistor gate, wherein the at least one secondary gate abuts the inter-poly dielectric layer on the first sidewall of the transistor gate; and
dielectric spacers disposed on the substrate and adjacent to the gate region, wherein the dielectric spacers are positioned away from the transistor gate, wherein the first and second heavily doped diffusion regions are laterally displaced about a same distance away from the transistor gate.
2. The device of claim 1 wherein the at least one secondary gate comprises a source side dual gate (SSDG) disposed between the transistor gate and the first heavily doped diffusion region, wherein the first heavily doped diffusion region is a transistor source region.
3. The device of claim 2 wherein the SSDG is a first secondary gate and the gate region comprises a second secondary gate, wherein the second secondary gate is a field plate gate disposed between the transistor gate and the second heavily doped diffusion region, wherein the second heavily doped diffusion region is a transistor drain region.
4. The device of claim 1 wherein the first and second heavily doped diffusion regions are laterally displaced away from an outer edge of the dielectric spacers and extend to a side of the device isolation region.
5. The device of claim 1 comprising first and second doped regions disposed within the device well and adjacent to the first and second sidewalls of the transistor gate.
6. The device of claim 5 wherein the first and second doped regions are lightly doped diffusion (LDD) regions, wherein the first and second LDD regions encompass the first and second heavily doped diffusion regions.
7. The device of claim 5 wherein the first doped region extends below the at least one secondary gate to underlap a portion of the transistor gate.
8. The device of claim 5 wherein the first and second doped regions comprise first polarity type dopants, wherein the first and second heavily doped diffusion regions comprise second polarity type dopants different from the first polarity type, wherein the first and second doped regions encompass the first and second heavily doped diffusion regions.
9. The device of claim 5 wherein the first doped region extends to partially underlap the at least one secondary gate without underlapping the transistor gate.
10. The device of claim 9 wherein the second doped region extends to partially underlap the transistor gate.
11. The device of claim 1 wherein the at least one secondary gate comprises first and second secondary gates abutting the inter-poly dielectric layer on the first and second sidewalls of the transistor gate without extending over the transistor gate.
12. The device of claim 1 wherein each of the transistor gate and the at least one secondary gate comprises a gate dielectric disposed directly on the substrate, wherein a gate dielectric thickness of the transistor gate is different from a gate dielectric thickness of the at least one secondary gate.
13. The device of claim 1 wherein the transistor gate comprises an inter-gate layer sandwiched between a top and a bottom gate electrode layer.
14. The device of claim 13 wherein the inter-gate layer comprises an oxide-nitride-oxide (ONO) stack.
15. The device of claim 1 wherein the transistor gate is a high voltage (HV) transistor gate, wherein the least one secondary gate is biased at a lower voltage value relative to the HV transistor gate.
16. A high voltage device comprising:
a substrate having a high voltage (HV) device region, wherein the HV device region comprises first and second heavily doped diffusion regions and a gate region defined thereon;
a device well disposed in the HV device region, wherein the device well encompasses the first and second heavily doped diffusion regions;
a primary gate disposed in the gate region;
at least one secondary gate disposed in the gate region and adjacent to a first or a second sidewall of the primary gate, wherein the at least one secondary gate is a field plate gate; and
dielectric spacers disposed on the substrate and adjacent to the gate region, wherein the first and second heavily doped diffusion regions are displaced away from the dielectric spacers, wherein the first and second heavily doped diffusion regions are disposed an equal distance away from the primary gate.
17. The high voltage device of claim 16 wherein a first and a second sidewall of the primary gate are each lined with an inter-poly dielectric layer.
18. The high voltage device of claim 16 comprising first and second doped regions disposed within the device well and adjacent to first and second sides of the primary gate, wherein the first doped region completely underlaps the first secondary gate and extends to partially underlap the primary gate.
19. The high voltage device of claim 16 comprising a second secondary gate disposed in the gate region, wherein the field plate gate is adjacent to the first sidewall of the primary gate and the second secondary gate is a source side dual gate (SSDG) disposed adjacent to the second sidewall of the primary gate.
20. A high voltage device comprising:
a substrate having a high voltage (HV) device region, wherein the HV device region comprises first and second heavily doped diffusion regions and a gate region defined thereon;
a device well disposed in the HV device region, wherein the device well encompasses the first and second heavily doped diffusion regions;
a primary gate disposed in the gate region, wherein a first and second sidewall of the primary gate are each lined with an inter-poly dielectric layer;
a first and a second secondary gate disposed in the gate region and adjacent to the first and second sidewalls of the primary gate, wherein the first secondary gate is a field plate gate; and
dielectric spacers disposed on the substrate and adjacent to the gate region, wherein the first and second heavily doped diffusion regions are displaced away from the dielectric spacers, wherein the first and second heavily doped diffusion regions are disposed an equal distance away from the primary gate.