Dual-semiconductor complementary metal-oxide-semiconductor device
A method of forming an active device on a semiconductor wafer includes the steps of: forming a plurality of semiconductor fins on at least a portion of a semiconductor substrate; forming a dielectric layer on at least a portion of the semiconductor substrate, the dielectric layer filling gaps between adjacent fins; forming a plurality of gate structures on an upper surface of the dielectric layer; forming a channel region on the dielectric layer and under at least a portion of the gate structures, the channel region comprising a first crystalline semiconductor material; forming source and drain epitaxy regions on an upper surface of the dielectric layer and between adjacent gate structures, the source and rain regions being spaced laterally from one another; and replacing the channel region with a second crystalline semiconductor material after high-temperature processing used in fabricating the active device has been completed.
1. An active semiconductor device, comprising:
a plurality of semiconductor fins formed on at least a portion of a semiconductor substrate;
a first dielectric layer formed on at least a portion of an upper surface of the semiconductor substrate, the first dielectric layer filling gaps between adjacent fins;
a plurality of gate structures formed on an upper surface of the first dielectric layer;
a channel region formed on the upper surface of the first dielectric layer and under at least a portion of the gate structures, the channel region comprising a first crystalline semiconductor material, the channel region further comprising a second crystalline semiconductor material formed on at least a portion of the upper surface of the first dielectric layer and between the gate structures, the second crystalline semiconductor material encapsulating the first crystalline semiconductor material and filling openings formed between the fins, the channel region being channel region being formed after high-temperature processing used in fabricating the active semiconductor device has been completed; and
source and drain regions formed on the upper surface of the first dielectric layer and between adjacent gate structures, the source and rain regions being spaced laterally from one another.
2. The device of claim 1 , further comprising a second dielectric layer formed over at least a portion of an upper surface of said semiconductor device, an upper surface of the second dielectric layer being planarized to a height of an upper surface of said gate structures.
3. The device of claim 1 , wherein the second crystalline semiconductor material comprises a horizontally grown nanowire structure.
4. The device of claim 1 , wherein the second crystalline semiconductor material comprises a Group III-V material.
5. The device of claim 1 , further comprising insulating spacers formed on at least a portion of sidewalls of said gate structures, the insulating spacers electrically isolating the gate structures from the second crystalline semiconductor material.
6. The device of claim 1 , wherein each of at least a subset of said plurality of gate structures comprises a metal.
7. The device of claim 1 , wherein said first and second crystalline semiconductor materials are different relative to one another.