Magnetic tunnel junction stack alignment scheme
View Patent ↗Device and methods of forming a device are disclosed. The method includes providing a substrate defined with a memory cell region. A first upper dielectric layer is provided over the substrate. The first upper dielectric layer includes a first upper interconnect level with one or more metal lines in the memory cell region. A second upper dielectric layer is provided over the first upper dielectric layer. The second upper dielectric layer includes a via plug coupled to the metal line of the first upper interconnect level. An alignment trench which extends from a top surface of the second upper dielectric layer to a portion of the second upper dielectric layer is formed. Various layers of a MTJ stack are formed over the second upper dielectric layer. Profile of the alignment trench is transferred to surfaces of the various layers of the MTJ stack to form a topography feature which serves as an alignment mark. The various layers of the MTJ stack are patterned to form a MTJ element using the alignment mark visible in top surface of the various layers of the MTJ stack to align the memory element to the underlying via plug.
1. A method of forming a device comprising:
providing a substrate defined with a memory cell region;
providing a first upper dielectric layer over the substrate, wherein the first upper dielectric layer comprises a first upper interconnect level with one or more metal lines in the memory cell region;
providing a second upper dielectric layer over the first upper dielectric layer, wherein the second upper dielectric layer comprises a via plug coupled to the metal line of the first upper interconnect level;
providing a protective layer over the second upper dielectric layer and covers the via plug;
forming an alignment trench which extends from a top surface of the protective layer to a portion of the second upper dielectric layer;
forming various layers of a magnetic tunnel junction (MTJ) stack over the second upper dielectric layer, wherein profile of the alignment trench is transferred to surfaces of the various layers of the MTJ stack to form a topography feature which serves as an alignment mark; and
patterning the various layers of the MTJ stack to define at least one MTJ element using the topography feature which serves as the alignment mark visible in top surface of the various layers of the MTJ stack to align the patterned MTJ element to the underlying via plug and to ensure that the patterned MTJ element is coupled to and in direct contact with the underlying via plug.
2. The method of claim 1 comprising:
forming a bottom electrode layer over the protective layer, wherein the bottom electrode layer lines top surface of the protective layer as well as sidewalls and bottom of the alignment trench.
3. The method of claim 2 wherein the bottom electrode and the protective layer comprise the same material.
4. The method of claim 3 wherein the bottom electrode and the protective layers comprise Ti, TiN, Ta and TaN.
5. The method of claim 2 comprising forming a top electrode layer over the various layers of the MTJ stack, wherein the top electrode layer tracks profile of the underlying various layers of the MTJ stack.
6. The method of claim 5 wherein patterning the various layers of the MTJ stack comprises:
providing a mask over the top electrode layer; and
performing an etch process to remove exposed portions of the top and bottom electrode layers and various layers of the MTJ stack not protected by the mask, wherein the etched bottom electrode comprises a length greater than a length of the etched top electrode.
7. The method of claim 1 wherein the alignment trench is formed in scribe lane of the device.
8. The method of claim 1 wherein the alignment trench is formed in device region of the device.
9. The method of claim 1 wherein the protective layer comprises an optically transparent material.
10. The method of claim 9 wherein the protective layer comprises SiN or nBLOK.
11. The method of claim 1 comprising removing the protective layer after forming the alignment trench.
12. The method of claim 11 comprising forming a bottom electrode layer over the second upper dielectric layer, wherein the bottom electrode layer lines a top surface of the second upper dielectric layer as well as sidewalls and bottom of the alignment trench.
13. The method of claim 12 comprising forming a top electrode layer over the various layers of the MTJ stack, wherein the top electrode layer tracks profile of the underlying various layers of the MTJ stack.
14. The method of claim 13 wherein patterning the various layers of the MTJ stack comprises:
providing a mask over the top electrode layer; and
performing an etch process to remove exposed portions of the top and bottom electrode layers and various layers of the MTJ stack not protected by the mask.
15. The method of claim 14 wherein the etched bottom electrode comprises a length greater than a length of the etched top electrode.
16. The method of claim 11 wherein the alignment trench is formed in scribe lane of the device.
17. The method of claim 1 comprising:
forming a dielectric liner over the first upper dielectric layer and covers the metal line, wherein the via plug extends from a top surface of the second upper dielectric layer to the dielectric liner.
18. A method of forming a device comprising:
providing a substrate defined with a memory cell region;
providing a first upper dielectric layer over the substrate, wherein the first upper dielectric layer comprises a first upper interconnect level with one or more metal lines in the memory cell region;
providing a second upper dielectric layer over the first upper dielectric layer, wherein the second upper dielectric layer comprises a via plug coupled to the metal line of the first upper interconnect level;
providing a protective layer over the second upper dielectric layer and covers the via plug;
forming an alignment trench which extends from a top surface of the second upper dielectric layer to a portion of the second upper dielectric layer;
forming a bottom electrode layer over the protective layer, wherein the bottom electrode layer lines top surface of the protective layer as well as sidewalls and bottom of the alignment trench;
forming various layers of a magnetic tunnel junction (MTJ) stack over the second upper dielectric layer, wherein profile of the alignment trench is transferred to surfaces of the various layers of the MTJ stack to form a topography feature which serves as an alignment mark; and
patterning the various layers of the MTJ stack to form a MTJ element using the alignment mark visible in top surface of the various layers of the MTJ stack to align the MTJ element to the underlying via plug.
19. A wafer comprising:
a wafer substrate defined with at least a memory cell region;
a first upper dielectric layer disposed over the substrate, wherein the first upper dielectric layer comprises a first upper interconnect level with one or more metal lines in the memory cell region;
a second upper dielectric layer disposed over the first upper dielectric layer, wherein the second upper dielectric layer comprises a via plug coupled to the metal line of the first upper interconnect level;
an alignment trench disposed in the second upper dielectric layer, wherein the alignment trench extends from a top surface of the second upper dielectric layer to a portion of the second upper dielectric layer;
at least one magnetic tunnel junction (MTJ) stack disposed over the second upper dielectric layer, wherein the MTJ stack is aligned and coupled to and in direct contact with the underlying via plug based on the alignment trench.
20. The wafer of claim 19 wherein the alignment trench is disposed in scribe lane of the wafer.