Composition, method for producing patterned substrate, film and forming method thereof, and compound
A composition includes a compound including a partial structure represented by formula (1), and solvent. In the formula (1), X 1 and X 2 each independently represent a substituted or unsubstituted ring structure having 4 to 10 ring atoms constituted taken together with the spiro carbon atom and the carbon atoms of the aromatic ring adjacent to X 1 or X 2 ; n1 and n2 are each independently an integer of 0 to 2; and the sum of k1 and k2 are each independently an integer of 1 to 8, wherein the sum of k1 and k2 is no less than 2 and no greater than 16. The compound is preferably represented by formula (2). The sum of k1 and k2 in the formula (1) is preferably no less than 3.
1. A composition comprising:
a compound represented by formula (2); and
a solvent:
(Ar 3 O—Ar 1 p1 k1 Z O Ar 2 —O p2 Ar 4 ) k2 (2)
wherein, in the formula (2), Z is a partial structure represented by formula (1); k1 and k2 are each independently an integer of 1 to 8, wherein a sum of k1 and k2 is no less than 3 and no greater than 16; Ar 1 and Ar 2 each independently represent a substituted or unsubstituted arenediyl group having 6 to 15 ring atoms; p1 and p2 are each independently an integer of 1 to 3; and Ar 3 and Ar 4 each independently represent a substituted or unsubstituted aryl group having 6 to 15 ring atoms, wherein in a case where Ar 1 to Ar 4 , p1 and p2 are each present in a plurality of number, the plurality of Ar 1 s are each identical or different, the plurality of Ar 2 s are each identical or different, the plurality of Ar 3 s are each identical or different, the plurality of Ar 4 s are each identical or different, the plurality of p1s are each identical or different and the plurality of p2s are each identical or different,
wherein, in the formula (1), X 1 and X 2 each independently represent a substituted or unsubstituted ring structure having 4 to 10 ring atoms constituted taken together with the spiro carbon atom and the carbon atoms of the aromatic ring adjacent to X 1 or X 2 ; R 1 and R 2 each independently represent a halogen atom, a nitro group or a monovalent organic group; a1 and a2 are each independently an integer of 0 to 7, wherein in a case where R 1 and R 2 are each present in a plurality of number, the plurality of R 1 s are each identical or different, and the plurality of R 2 s are each identical or different; n1 and n2 are each independently an integer of 0 to 2; k1 and k2 are each as defined in the formula (2), a sum of a1 and k1, and a sum of a2 and k2 are each no less than 1 and no greater than 8; and * represents an atomic bonding.
2. The composition according to claim 1 , wherein the solvent comprises a polyhydric alcohol partial ether acetate solvent, a ketone solvent, a carboxylic acid ester solvent, or a combination thereof.
3. A method for producing a patterned substrate, comprising:
applying a composition on an upper face side of a substrate to provide a resist underlayer film;
forming a resist pattern directly or indirectly on the resist underlayer film; and
etching at least the resist underlayer film and the substrate using the resist pattern as a mask such that the substrate has a pattern,
wherein the composition comprises:
a compound represented by formula (2); and
a solvent:
(Ar 3 O—Ar 1 p1 k1 Z O Ar 2 —O p2 Ar 4 ) k2 (2)
wherein, in the formula (2), Z is a partial structure represented by formula (1); k1 and k2 are each independently an integer of 1 to 8, wherein a sum of k1 and k2 is no less than 3 and no greater than 16; Ar 1 and Ar 2 each independently represent a substituted or unsubstituted arenediyl group having 6 to 15 ring atoms; p1 and p2 are each independently an integer of 1 to 3; and Ar 3 and Ar 4 each independently represent a substituted or unsubstituted aryl group having 6 to 15 ring atoms, wherein in a case where Ar 1 to Ar 4 , p1 and p2 are each present in a plurality of number, the plurality of Ar 1 s are each identical or different, the plurality of Ar 2 s are each identical or different, the plurality of Ar 3 s are each identical or different, the plurality of Ar 4 s are each identical or different, the plurality of p1s are each identical or different and the plurality of p2s are each identical or different,
wherein, in the formula (1), X 1 and X 2 each independently represent a substituted or unsubstituted ring structure having 4 to 10 ring atoms constituted taken together with the spiro carbon atom and the carbon atoms of the aromatic ring adjacent to X 1 or X 2 ; R 1 and R 2 each independently represent a halogen atom, a nitro group or a monovalent organic group; a1 and a2 are each independently an integer of 0 to 7, wherein in a case where R 1 and R 2 are each present in a plurality of number, the plurality of R 1 s are each identical or different, and the plurality of R 2 s are each identical or different; n1 and n2 are each independently an integer of 0 to 2; k1 and k2 are each as defined in the formula (2), wherein a sum of a1 and k1, and a sum of a2 and k2 are each no less than 1 and no greater than 8; and * represents an atomic bonding.
4. A method for forming a film, comprising:
providing a coating film using a composition; and
removing a solvent from the coating film,
wherein the composition comprises:
a compound represented by formula (2); and
the solvent:
(Ar 3 O—Ar 1 p1 k1 Z O Ar 2 —O p2 Ar 4 ) k2 (2)
wherein, in the formula (2), Z is a partial structure represented by formula (1); k1 and k2 are each independently an integer of 1 to 8, wherein a sum of k1 and k2 is no less than 3; p1 and p2 are each independently an integer of 1 to 3; and Ar 3 and Ar 4 each independently represent a substituted or unsubstituted aryl group having 6 to 15 ring atoms, wherein in a case where Ar 1 to Ar 4 , p1 and p2 are each present in a plurality of number, the plurality of Ar 3 s are each identical or different, the plurality of Ar 2 s are each identical or different, the plurality of Ar 3 s are each identical or different, the plurality of Ar 4 s are each identical or different, the plurality of p1s are each identical or different and the plurality of p2s are each identical or different,
wherein, in the formula (1), X 1 and X 2 each independently represent a substituted or unsubstituted ring structure having 4 to 10 ring atoms constituted taken together with the spiro carbon atom and the carbon atoms of the aromatic ring adjacent to X 1 or X 2 ; R 1 and R 2 each independently represent a halogen atom, a nitro group or a monovalent organic group; a1 and a2 are each independently an integer of 0 to 7, wherein in a case where R 1 and R 2 are each present in a plurality of number, the plurality of R 1 s are each identical or different, and the plurality of R 2 s are each identical or different; n1 and n2 are each independently an integer of 0 to 2; k1 and k2 are each as defined in the formula (2), wherein a sum of a1 and k1, and a sum of a2 and k2 are each no less than 1 and no greater than 8; and * represents an atomic bonding.
5. The method according to claim 3 , wherein the solvent comprises a polyhydric alcohol partial ether acetate solvent, a ketone solvent, a carboxylic acid ester solvent, or a combination thereof.
6. The method according to claim 3 , wherein in the formula (2), p1 and p2 are each independently an integer of 1 or 2.
7. The method according to claim 3 , wherein in the formula (2), p1 and p2 are each an integer of 1.
8. The method according to claim 7 , wherein in the formula (2), each of Ar 1 and Ar 2 is substituted with a cyano group.
9. The method according to claim 3 , wherein in the formula (2), at least one of Ar 1 , Ar 2 , Ar 3 , and Ar 4 is substituted with a fluorine atom,a chlorine atom, a bromine atom, an iodine atom, a hydroxy group, an amino group, a cyano group, a nitro group, an alkoxy group, an alkoxycarbonyl group, an alkoxycarbonyloxy group, an acyl group, an arylaminocarbonyl group, or an arylamino group.
10. The method according to claim 3 , wherein in the formula (2), at least one of Ar 1 , Ar 2 , Ar 3 , and Ar 4 is substituted with a cyano group.
11. The method according to claim 3 , wherein the composition further comprises an acid generating agent.
12. The method according to claim 3 , wherein the composition further comprises a crosslinking agent.
13. The method according to claim 4 , wherein in the formula (2), p1 and p2 are each independently an integer of 1 or 2.
14. The method according to claim 4 , wherein in the formula (2), p1 and p2 are each an integer of 1.
15. The method according to claim 14 , wherein in the formula (2), each of Ar 1 and Ar 2 is substituted with a cyano group.
16. The method according to claim 4 , wherein in the formula (2), at least one of Ar 1 , Ar 2 , Ar 3 , and Ar 4 is substituted with a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, a hydroxy group, an amino group, a cyano group, a nitro group, an alkoxy group, an alkoxcarbonyl group, an alkoxycarbonyloxy group, an acyl group, an arylaminocarbonyl group, or an arylamino group.
17. The method according to claim 4 , wherein in the formula (2), at least one of Ar 1 , Ar 2 , Ar 3 , and Ar 4 is substituted with a cyano group.
18. The method according to claim 4 , wherein the composition further comprises an acid generating agent.
19. The method according to claim 4 , wherein the composition further comprises a crosslinking agent.
20. The composition according to claim 1 , wherein in the formula (2), p1 and p2 are each an integer of 1.
21. The composition according to claim 20 , wherein in the formula (2), each of Ar 1 and Ar 2 is substituted with a cyano group.