Low-temperature hermetic sealing for diffractive optical element stacks
A method for producing an optical apparatus includes providing a pair of glass wafers. One or more diffractive optical elements (DOEs) are formed on one or more of the glass wafers. A spacer is positioned between the glass wafers so as to define a cavity containing the DOEs, and a hermetic seal that bonds the glass wafers together and seals the cavity is formed.
1. Optical apparatus, comprising:
a pair of glass wafers directly coupled to one another at one or more interfaces; and
one or more diffractive optical elements (DOEs) formed on one or more of the glass wafers,
wherein the glass wafers have a cavity therebetween containing the DOEs, and are directly welded to one another at one or more of the interfaces, so as to hermetically seal the cavity.
2. The optical apparatus according to claim 1 , wherein the one or more DOEs comprise a diffractive pattern in a polymer layer coupled to at least one of the glass wafers.
3. The optical apparatus according to claim 1 , wherein the one or more DOEs are patterned in at least one of the glass wafers.
4. The optical apparatus according to claim 1 , and comprising a seal, which is positioned between the glass wafers and is welded to the glass wafers.
5. The optical apparatus according to claim 4 , wherein the seal comprises a glass seal.
6. Optical apparatus, comprising:
a light source, which is configured to emit light; and
a diffractive optical element (DOE) assembly, which is configured to project a pattern of light in response to the light emitted by the light source, the DOE assembly comprising:
a pair of glass wafers directly coupled to one another at one or more interfaces; and
one or more diffractive optical elements (DOEs) formed on one or more of the glass wafers,
wherein the glass wafers have a cavity therebetween containing the DOEs, and are directly welded to one another at one or more of the interfaces, so as to hermetically seal the cavity.