Wiring structure for trench fuse component with methods of fabrication
The present disclosure generally relates to a wiring structure for a fuse component and corresponding methods of fabrication. A wiring structure for a fuse component according to the present disclosure can include: a first electrical terminal embedded within a doped conductive layer, the doped conductive layer being positioned between two insulator layers of an integrated circuit (IC) structure; a dielectric liner positioned between the first electrical terminal and the doped conductive layer; a second electrical terminal embedded within the doped conductive layer; wherein each of the first electrical terminal and the second electrical terminal are further embedded in one of the two insulator layers, and the dielectric liner is configured to degrade upon becoming electrically charged.
1. A wiring structure for a trench fuse component, the wiring structure comprising:
a first electrical terminal embedded within a doped conductive layer, the doped conductive layer being positioned between two insulator layers of an integrated circuit (IC) structure;
a dielectric liner positioned between the first electrical terminal and the doped conductive layer;
a second electrical terminal embedded within the doped conductive layer;
wherein each of the first electrical terminal and the second electrical terminal are further embedded in one of the two insulator layers, and the dielectric liner is configured to degrade upon becoming electrically charged.
2. The wiring structure of claim 1 , wherein the dielectric liner includes a dielectric material having a dielectric constant of at least approximately 3.9.
3. The wiring structure of claim 2 , wherein the dielectric liner includes a conductive region formed by degradation of the dielectric material.
4. The wiring structure of claim 1 , further comprising a transistor electrically coupled between a power supply and one of the first electrical terminal and the second electrical terminal.
5. The wiring structure of claim 4 , wherein the power supply has a voltage bias magnitude of at least approximately 2.0 V.
6. The wiring structure of claim 1 , further comprising a silicide region coupling the transistor to one of the first electrical terminal and the second electrical terminal.
7. The wiring structure of claim 1 , wherein the doped conductive layer includes one of polysilicon, silicon germanium, and a conductive organic material.
8. The wiring structure of claim 1 , further comprising an isolation ring enclosing a cross sectional area of the first electrical terminal, the second electrical terminal, and the doped conductive layer.
9. The wiring structure of claim 1 , further comprising a doped substrate layer positioned adjacent to one of the two insulator layers, wherein the doped substrate layer is doped one of p-type and n-type, and the doped conductive layer is doped the other of p-type and n-type.
10. The wiring structure of claim 1 , wherein a portion of the first electrical terminal includes one of polysilicon, silicon germanium, and a conductive organic material.
11. A trench antifuse structure comprising:
a substrate;
a first insulator layer positioned adjacent to the substrate;
a doped conductive layer positioned adjacent to the first insulator layer;
a second insulator layer positioned adjacent to the doped conductive layer;
a semiconductor-on-insulator (SOI) layer positioned adjacent to the second insulator layer;
a first electrical terminal embedded within the doped conductive layer, the second insulator layer, and the SOI layer;
a dielectric liner positioned between the first electrical terminal and the doped conductive layer; and
a second electrical terminal embedded within the doped conductive layer, the second insulator layer, and the SOI layer;
wherein the dielectric liner is configured to degrade upon becoming electrically charged.
12. The antifuse structure of claim 11 , further comprising an isolation ring a cross sectional area of the first electrical terminal, the second electrical terminal, and the doped conductive layer.