IP Library Granted Patent US 9,935,214
Granted Patent B2
US 9,935,214 · App. 14/880,808 · Granted Apr 3, 2018

Liftoff process for exfoliation of thin film photovoltaic devices and back contact formation

Inventors: Richard A. Haight (Mahopac, NY); James B. Hannon (Lake Lincolndale, NY); Satoshi Oida (Yorktown Heights, NY)
Assignee: International Business Machines Corporation
H01L31/022441H01L31/0324H01L31/0326H01L31/03926H01L31/1892H01L31/03923H01L31/03925
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Quick Facts
Patent No.
US 9,935,214
App. No.
14/880,808
Granted
Apr 3, 2018
Kind
B2
Abstract

A method for forming a back contact on an absorber layer in a photovoltaic device includes forming a two dimensional material on a first substrate. An absorber layer including Cu—Zn—Sn—S(Se) (CZTSSe) is grown over the first substrate on the two dimensional material. A buffer layer is grown on the absorber layer on a side opposite the two dimensional material. The absorber layer is exfoliated from the two dimensional material to remove the first substrate from a backside of the absorber layer opposite the buffer layer. A back contact is deposited on the absorber layer.

Claims (27)

1. A method for forming a back contact on an absorber layer in a photovoltaic device, comprising:

forming a two dimensional material on a first substrate;

growing an absorber layer including Cu—Zn—Sn—S(Se) (CZTSSe) over the first substrate on the two dimensional material;

growing a buffer layer on the absorber layer on a side opposite the two dimensional material;

exfoliating the absorber layer from the two dimensional material to remove the first substrate from a backside of the absorber layer opposite the buffer layer; and

depositing a back contact on the absorber layer.

2. The method as recited in claim 1 , wherein the first substrate includes a metal coated glass.

3. The method as recited in claim 1 , wherein the two dimensional material includes one or more monolayers of graphene.

4. The method as recited in claim 1 , further comprising adhering the back contact to a flexible substrate to form a flexible photovoltaic device.

5. The method as recited in claim 1 , wherein exfoliating the absorber layer includes mechanically splitting the absorber layer from the two dimensional material.

6. The method as recited in claim 1 , wherein exfoliating the absorber layer includes thermally splitting the absorber layer from the two dimensional material.

7. The method as recited in claim 1 , further comprising forming a transparent conductor over the buffer layer.

8. The method as recited in claim 7 , further comprising forming metal structures on the transparent conductor.

9. A method for forming a flexible photovoltaic device, comprising:

forming graphene on a metal coated glass substrate;

growing an absorber layer including Cu—Zn—Sn—S(Se) (CZTSSe) over the first substrate on the graphene;

growing a buffer layer on the absorber layer on a side opposite the graphene;

forming a transparent conductor over the buffer layer;

exfoliating the absorber layer from the graphene to remove the metal coated glass substrate from a backside of the absorber layer opposite the buffer layer;

cleaning the backside of the absorber layer;

depositing a back contact on the absorber layer; and

adhering the back contact to a flexible substrate to form a flexible photovoltaic device.

10. The method as recited in claim 9 , wherein the graphene includes one or more monolayers.

11. The method as recited in claim 9 , wherein exfoliating the absorber layer includes mechanically splitting the absorber layer from the graphene.

12. The method as recited in claim 9 , wherein exfoliating the absorber layer includes thermally splitting the absorber layer from the graphene.

13. The method as recited in claim 9 , further comprising forming metal structures on the transparent conductor.

14. The method as recited in claim 9 , further comprising forming an antireflection coating on the transparent conductor.

Assignments (3)
CONFIRMATORY LICENSE Recorded Feb 6, 2017
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 041630/0746 →
CONFIRMATORY LICENSE Recorded Jan 15, 2016
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 037547/0618 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 12, 2015
From: HAIGHT, RICHARD A.; HANNON, JAMES B.; OIDA, SATOSHI
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 036774/0599 →
Continuity (1)
Related Publication 20170104113A1 · Apr 13, 2017