FinFET device
A fin-type field-effect transistor (FinFET) device includes a plurality of fins formed over a substrate. The semiconductor device further includes a dielectric layer filled in a space between each fin and over a first portion of the plurality of fins and a dielectric trench formed in the dielectric layer. The dielectric trench has a vertical profile. The semiconductor device further includes a second portion of the plurality of fins recessed and exposed in the dielectric trench. The second portion of the plurality of fins have a rounded-convex-shape top profile.
1. A fin-type field-effect transistor (FinFET) device comprising:
a plurality of fins of the FinFET device formed over a substrate;
a dielectric layer filled in a space between each fin and over the plurality of fins, wherein the dielectric layer has a dielectric trench between a first fin and a second fin; and
a third fin and a fourth fin disposed in the dielectric trench, wherein the third and fourth fins have a height shorter than that of the first and second fins.
2. The FinFET device of claim 1 , wherein each of the third and fourth fins has a rounded-convex shape top.
3. The FinFET device of claim 1 , wherein each of the third and fourth fins has a taped shape.
4. The FinFET device of claim 1 , wherein the first and second fins include:
a portion of a hard mask layer on tops of the first and second fins; and
the dielectric layer is formed over the portion of the hard mask layer and surrounding the first and second fins.
5. The FinFET device of claim 1 , wherein the third fin has a first portion and a second portion, and the fourth fin has a third portion and a fourth portion, wherein the first portion and the third portion are surrounded by the dielectric layer, and the second portion and the fourth portion are above the dielectric layer.
6. The FinFET device of claim 5 , wherein the third and fourth fins have substantially similar heights and widths.
7. The FinFET device of claim 1 , wherein the dielectric layer includes a low-k dielectric material layer.
8. The FinFET device of claim 1 , wherein the dielectric layer includes at least one material selected from the group consisting of silicon oxide, silicon nitride, and oxynitride.
9. A semiconductor device comprising:
a plurality of fins formed over a substrate;
a dielectric layer filled in a space between each fin and over the plurality of fins, wherein the dielectric layer has a first dielectric trench and a second dielectric trench;
a first fin and a second fin disposed inside the first dielectric trench, wherein the dielectric layer is disposed between and adjacent to the first fin and the second fin;
a third fin and a fourth fin disposed inside the second dielectric trench, wherein the third and fourth fins have a rounded-convex-shape top, and
a fifth fin and a sixth fin disposed between the first and second dielectric trenches, wherein the fifth fin and the sixth fin are surrounded and covered by the dielectric layer.
10. The device of claim 9 , wherein the first and second fins have heights greater than that of the dielectric layer disposed between the first and second fins.
11. The device of claim 9 , each of the first and second fins has a rounded-concave shape top.
12. The device of claim 11 , wherein the dielectric layer disposed between the first and second fins has a height greater than the first and second fins.
13. The device of claim 9 , wherein the dielectric layer disposed between the first and second fins has a height shorter than that of the fifth and six fins.
14. The device of claim 9 , wherein the third fin has a first portion and a second portion, and the fourth fin has a third portion and a fourth portion, wherein the first portion and the third portion are surrounded by the dielectric layer and the second portion and the fourth portion are above the dielectric layer and have the rounded-convex-shape tops.
15. The device of claim 9 , wherein the third and fourth fins have a tapered shape.
16. A semiconductor device comprising:
a substrate;
a plurality of fins formed over the substrate;
a dielectric layer filled in a space between each fin and above the fins, wherein the dielectric layer has a dielectric trench between a third fin and a fourth fin;
a first fin and a second fin disposed inside the dielectric trench, wherein the first and second fins have a height shorter than that of the third and fourth fins.
17. The device of claim 16 , wherein a portion of the dielectric layer is disposed between the first and second fins, and
wherein the first and second fins have heights shorter than the portion of the dielectric layer.
18. The device of claim 16 , wherein a portion of the dielectric layer is disposed between the first and second fins, and
wherein the portion of the dielectric layer has a height shorter than that of third and fourth fins.
19. The device of claim 16 , wherein the dielectric layer covers a top surface of the third fin.
20. The device of claim 16 , wherein at least one of the fins from the plurality of fins is associated with a FinFET device disposed over the substrate.