Method of manufacturing semiconductor device
View Patent ↗A semiconductor device includes a common wire that sequentially connects three or more pads; bonding portions at which a side surface of the wire is bonded to the pads; and looping portions looped from the bonding portions onto the other pads adjacent to the pads, the bonding portions and the looping portions are formed alternately. When the pads are recessed from the surface of semiconductor chips, the common wire is crushed to a thickness greater than the recess depth of the pads to be made into a flat shape. Thus, on the semiconductor device, wire connection is performed with a smaller bonding count while reducing damage to the semiconductor chips, and at the same time bonding is performed efficiently to the electrodes recessed from the surface of the semiconductor chips.
1. A method of manufacturing a semiconductor device, comprising:
a bonding step of pressing a side surface of a common wire against a first electrode with a capillary and bonding the side surface of the common wire to the first electrode; and
a looping step of looping the common wire onto a second electrode with the capillary after the bonding step,
the bonding step and the looping step being repeated alternately to sequentially connect three or more electrodes on semiconductor chips and a substrate with the common wire,
the looping step comprises:
a first raising step of raising the capillary vertically from the first electrode after the bonding step;
a first obliquely moving step of moving the capillary obliquely downward toward the second electrode after the first raising step;
a second raising step of raising the capillary vertically again after the first obliquely moving step;
a reverse step of moving the capillary obliquely downward in a direction opposite to the second electrode after the second raising step;
a second obliquely moving step of moving the capillary obliquely upward to directly above the first electrode after the reverse step;
a third raising step of raising the capillary vertically again after the second obliquely moving step; and
an arcuately moving step of moving the capillary in an arc to directly above the second electrode after the third raising step.
2. The method of manufacturing the semiconductor device according to claim 1 wherein,
in the bonding step, the common wire is crushed to a thickness of ¼ to ½ of its diameter with the capillary to be made into a flat shape, and at the same time, the common wire is ultrasonically vibrated to be bonded to each of the electrodes.
3. The method of manufacturing the semiconductor device according to claim 1 , wherein in the reverse step, the capillary is moved to a point at which an angle with respect to a line perpendicular to the electrode and passing through the bonding portion becomes 10° to 20°.
4. The method of manufacturing the semiconductor device according to claim 1 , wherein
at least one of the electrodes is a pad recessed from a surface of the semiconductor chip, and
in the bonding step, the common wire is crushed with the capillary to a thickness greater than a recess depth of the pad to be made into a flat shape, and at the same time, the common wire is ultrasonically vibrated to be bonded to the pad.