IP Library › Granted Patent US 10,507,604
Granted Patent B2
US 10,507,604 · App. 14/884,529 · Granted Dec 17, 2019

Nanotransfer printing method and surface-enhanced raman scattering substrate, surface-enhanced raman scattering vial and surface-enhanced raman scattering patch manufactured using the same

Inventors: Yeon Sik Jung (Daejeon, KR); Jae Won Jeong (Daejeon, KR); Kwang Min Baek (Daejeon, KR); Jong Min Kim (Daejeon, KR); Tae Won Nam (Daejeon, KR)
Assignee: Korea Advanced Institute of Science and Technology
B29C39/026C23C14/04B29L2031/757
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Quick Facts
Patent No.
US 10,507,604
App. No.
14/884,529
Granted
Dec 17, 2019
Kind
B2
Abstract

A nanotransfer printing method, including the steps of coating a polymer thin film on a template substrate where a surface pattern is formed, fabricating the polymer thin film into a thin-film replica mold by using the polymer thin film and an adhesive film, forming nanostructures on the thin-film replica mold, selectively weakening an adhesive force between the adhesive film and the thin-film replica mold, and transferring the nanostructures into a target object, is provided.

Claims (49)

1. A nanotransfer printing method comprising:

coating a polymer thin film on a template substrate where a surface pattern is formed;

fabricating the polymer thin film into a thin-film replica mold by using the polymer thin film and an adhesive film;

forming nanostructures on the thin-film replica mold;

selectively weakening an adhesive force between the adhesive film and the polymer thin film of the thin-film replica mold; and

transferring the nanostructures onto a target object,

wherein the selective weakening of the adhesive force between the adhesive film and the polymer thin film of the thin-film replica mold comprises:

injecting an organic solvent vapor between the adhesive film and the polymer thin film of the thin-film replica mold to reduce interfacial detachment energy.

2. The nanotransfer printing method of claim 1 , wherein the forming of the nanostructures comprises:

depositing a functional material on the thin-film replica mold through an angled deposition.

3. The nanotransfer printing method of claim 2 , wherein the depositing of the functional material on the thin-film replica mold comprises:

depositing the functional material on the thin-film replica mold, which is slanted to have a specific angle with a surface of the thin-film replica mold that is prepared for the deposition of the thin-film replica mold in a direction of the deposition, to deposit the functional material only on protruded parts of the surface of the thin-film replica mold that is prepared for the deposition of the thin-film replica mold.

4. The nanotransfer printing method of claim 1 , wherein the template substrate is formed with a rugged type of the surface pattern through a reactive ion etching process and a patterning process including at least one of photolithography, block copolymer self-assembling lithography, or E-beam lithography.

5. The nanotransfer printing method of claim 1 , wherein the coating of the polymer thin film comprises one of:

spreading a monolayered thin film and forming the polymer thin film; and

sequentially spreading a first thin film and a second thin film and forming the polymer thin film as a multilayered thin film.

6. The nanotransfer printing method of claim 1 , wherein the coating of the polymer thin film comprises:

spreading the polymer thin film through at least one of spin coating, deep coating, or spray coating.

7. The nanotransfer printing method of claim 1 , wherein the fabricating of the polymer thin film into the thin-film replica mold comprises:

uniformly attaching the adhesive film to a side of the polymer thin film; and

separating the polymer thin film, to which the adhesive film is attached, from the template substrate.

8. The nanotransfer printing method of claim 1 , wherein the injecting of the organic solvent vapor between the adhesive film and the polymer thin film of the thin-film replica mold comprises one of:

touching a polymer pad, which contains an organic solvent, to the polymer thin film of the thin-film replica mold and providing the organic solvent vapor; and

providing the organic solvent vapor that is evaporated from a liquid organic solvent.

9. The nanotransfer printing method of claim 8 , wherein the organic solvent has a solubility parameter that is similar to that of at least one of the polymer thin film or the adhesive film.

10. The nanotransfer printing method of claim 1 , wherein the transferring of the nanostructures onto the target object comprises:

touching the adhesive film and the thin-film replica mold, in which the nanostructures are formed, to the target object to make the nanostructures meet the target object; and

separating the thin-film replica mold and the adhesive film from the target object to make the nanostructures transferred onto the target object.

11. The nanotransfer printing method of claim 10 , wherein the separating of the thin-film replica mold and the adhesive film from the target object comprises:

separating the adhesive film from the thin-film replica mold that is touched to the target object; and

using an organic solvent to remove the thin-film replica mold that is touched to the target object.

12. The nanotransfer printing method of claim 1 , further comprising:

repeating the transferring of the nanostructures onto the target object to generate a three-dimensional nanostructured SERS device with a stack of a plurality of layers.

13. The nanotransfer printing method of claim 1 , wherein the transferring of the nanostructures onto the target object further comprises:

transferring the nanostructures onto a metallic thin film.

14. A nanotransfer printing method comprising:

coating a polymer thin film on a template substrate where a surface pattern is formed;

fabricating the polymer thin film into a thin-film replica mold by using the polymer thin film and an adhesive film;

forming nanostructures on the thin-film replica mold;

selectively weakening an adhesive force between the adhesive film and the polymer thin film of the thin-film replica mold; and

transferring the nanostructures onto a target object,

wherein the transferring of the nanostructures into the target object comprises:

touching the adhesive film and the thin-film replica mold, in which the nanostructures are formed, to a polymer pad to make the nanostructures meet the polymer pad;

separating the thin-film replica mold and the adhesive film from the polymer pad to leave the nanostructures on the polymer pad;

touching the polymer pad, in which the nanostructures remain, to the target object to make the nanostructures meet the target object; and

separating the polymer pad from the target object to make the nanostructures transferred onto the target object.

15. The nanotransfer printing method of claim 14 , wherein the separating of the thin-film replica mold and the adhesive film from the polymer pad comprises:

separating the adhesive film from the polymer film of the thin-film replica mold that is touched to the polymer pad; and

using an organic solvent to remove the thin-film replica mold that is touched to the polymer pad.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 24, 2015
From: JUNG, YEON SIK; JEONG, JAE WON; BAEK, KWANG MIN; KIM, JONG MIN; NAM, TAE WON
To: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
Reel/Frame 037356/0916 →
Priority Claims (3)
KR 10-2014-0148502 · Oct 29, 2014 · national
KR 10-2014-0159159 · Nov 14, 2014 · national
KR 10-2015-0129896 · Sep 14, 2015 · national
Continuity (1)
Related Publication 20160202123A1 · Jul 14, 2016