Apparatus and method for lifting objects

1. An apparatus for lifting an object, comprising:

a plurality of piezo actuators that expand in directions upon activation to thereby generate pressure forces on an active side of each piezo actuator;

a hydraulic transmission device configured to:

convert the pressure forces of the piezo actuators into a vertical pressure force to move the object in a direction counter to a direction of gravity; and

transmit said converted pressure forces with a transmission ratio; and

a spring system connected between the object and the hydraulic transmission device, the spring system providing a spring force counter to the vertical pressure force of the hydraulic transmission device.

2. An apparatus for lifting an object, comprising:

a plurality of piezo actuators that expand in directions upon activation to thereby generate pressure forces on an active side of each piezo actuator; and

a hydraulic transmission device configured to:

convert the pressure forces of the piezo actuators into a vertical pressure force to move the object in a direction counter to a direction of gravity; and

transmit said converted pressure forces with a transmission ratio;

wherein the hydraulic transmission device includes:

a movable piezo actuator bellows on the active side of each piezo actuator, wherein the piezo actuator bellows contain a common fluid; and

a line system configured to transport the common fluid to and into a vertically movable central bellows that provides the vertical pressure force.

3. The apparatus of claim 2 , wherein the line system connects line portions extending out of the piezo actuator bellows to a common vertical line connected to the central bellows.

4. The apparatus of claim 3 , wherein the piezo actuators, the piezo actuator bellows, the line system, and the central bellows are configured symmetrically with respect to a vertical axis of symmetry of the common vertical line.

5. The apparatus of claim 4 , comprising four piezo actuators arranged in two opposing pairs extending in two horizontal planes.

6. The apparatus of claim 4 , wherein the piezo actuators and piezo actuator bellows are fixed between an outer retaining sleeve and an inner retaining sleeve, wherein said retaining sleeves are rotationally symmetrical to the vertical main axis of symmetry, and wherein the line portions extending out of the piezo actuator bellows extend horizontally and through the inner retaining sleeve.

7. The apparatus of claim 6 , further comprising a spring system includes a horizontally extending first spring element mounted on an upper planar end of the inner retaining sleeve, wherein the inner retaining sleeve extends vertically higher than the outer retaining sleeve.

8. The apparatus of claim 7 , wherein the object rests on an upper planar end of a main retaining sleeve that is rotationally symmetrical to the vertical main axis of symmetry, said main retaining sleeve being fixed to the first spring element under the object.

9. The apparatus of claim 8 , wherein the spring system includes a horizontally extending second spring element mounted beneath the piezo actuators by the inner retaining sleeve and is fixed to the main retaining sleeve.

10. The apparatus of claim 7 , wherein at least one of the first spring element or the second spring element comprises a spring ring that is rotationally symmetrical to the vertical main axis of symmetry.

11. The apparatus of claim 7 , wherein the central bellows transfers the vertical pressure force to the first spring element via a stroke transfer element arranged between said central bellows and the first spring element, the stroke transfer element comprising a bracket symmetrical to the vertical main axis of symmetry.

12. The apparatus of claim 1 , wherein the object is a chuck plate or a carrier plate.

13. The apparatus of claim 1 , wherein the piezo actuators are controllable individually and in a combinable manner by a control device.

14. A method for lifting an object, of the method comprising:

activating a plurality of piezo actuators that expand in directions to thereby generate pressure forces on an active side of each piezo actuator; and

moving the object in a direction counter to a direction of gravity by converting and transmitting the pressure forces of the piezo actuators into a vertical pressure force via a hydraulic transmission device;

wherein the hydraulic transmission device includes a movable piezo actuator bellows on the active side of each piezo actuator, wherein all of the piezo actuator bellows contain a common fluid which is transported by a line system to and into a vertically movable central bellows that provides the vertical pressure force.

15. The method of claim 14 , wherein a spring system acts between the object and the hydraulic transmission device, with a spring force of the spring system acting counter to the vertical pressure force of the hydraulic transmission device.

16. The method of claim 14 , wherein the central bellows transfers the vertical pressure force to a first spring element by a stroke transfer element arranged between said central bellows and the first spring element, the stroke transfer element comprising a bracket symmetrical to the vertical main axis of symmetry.

17. The method of claim 14 , comprising using a control device to control the piezo actuators individually and in a combinable manner.

18. The method of claim 14 , wherein the object has a mass of 100 to 1000 g, and wherein the method comprises lifting the object with a stroke of 0.5 to 5 mm within 1 to 10 ms with a positioning inaccuracy of less than 10 μm.