IP Library Granted Patent US 10,790,144
Granted Patent B2
US 10,790,144 · App. 14/900,307 · Granted Sep 29, 2020

Method to produce pyrite

Inventors: Nathan Newman (Tempe, AZ); Mahmoud Vahidi (Tempe, AZ); Stephen Lehner (Tempe, AZ); Peter Buseck (Tempe, AZ)
Assignee: Arizona Board of Regents on behalf of Arizona State University
H01L21/02568H01L21/02417H01L21/02614H01L21/02631H01L29/04H01L29/24
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Quick Facts
Patent No.
US 10,790,144
App. No.
14/900,307
Granted
Sep 29, 2020
Kind
B2
Abstract

A method for preparing a device having a film on a substrate is disclosed. In the method, a film is deposited on a substrate. The film includes a single-crystalline or poly-crystalline semiconducting thin film. The single-crystalline or poly-crystalline semiconducting thin film is formed by sequential evaporation of a first and a second element. One example device prepared by the method includes a silicon substrate and a film on the substrate, wherein the film includes semiconducting and single- or poly-crystalline pyrite as the compound.

Claims (20)

1. A method for preparing a device having a film on a substrate, the method comprising:

(a) providing a substrate;

(b) maintaining a first pressure in a first chamber;

(c) depositing a first element to form a thin film on the substrate in the first chamber;

(d) maintaining a second pressure between 1 mTorr and 1 Torr in the second chamber;

(e) depositing a second element over the film of the first element on the substrate in the second chamber, wherein the second element is a non-metal element and reacts with the first element in the film to form a thin film of a single phase pyrite semiconducting compound;

(f) repeating steps (b) through (e) at least until the thin film of the semiconducting compound is formed on the substrate;

wherein the second pressure is at least one order of magnitude greater than the first pressure; and

wherein the deposition of the second element is conducted between 250° C. and 450° C.

2. The method of claim 1 , wherein the substrate in step (a) is a silicon wafer.

3. The method of claim 1 , wherein the first element is deposited by a method of molecular beam epitaxy.

4. The method of claim 1 , wherein the second element is deposited by a method of molecular beam epitaxy.

5. The method of claim 1 , wherein the second element is sulfur.

6. The method of claim 1 , wherein pyrite is either single-crystalline or polycrystalline.

7. The method of claim 1 , wherein the first and the second elements are deposited under an air-tight condition.

8. The method of claim 1 , wherein the first pressure is less than 1.5×10 −5 Torr in step.

9. The method of claim 1 , wherein the second pressure is greater than three orders of magnitude relative to the first pressure.

10. The method of claim 1 , wherein the deposition of the first element is conducted between 250° C. and 450° C.

11. The method of claim 1 , wherein the thin film of the semiconducting compound has a thickness larger than 25 nanometers.

12. The method of claim 1 , wherein the thin film of the semiconducting compound epitaxially grows on the substrate.

Assignments (2)
CONFIRMATORY LICENSE Recorded Aug 1, 2016
From: ARIZONA STATE UNIVERSITY, TEMPE
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 039516/0312 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 21, 2015
From: NEWMAN, NATHAN; VAHIDI, MAHMOUD; LEHNER, STEPHEN; BUSECK, PETER
To: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY
Reel/Frame 037340/0022 →
Continuity (1)
Related Publication 20160379821A1 · Dec 29, 2016