Reverse conduction insulated gate bipolar transistor (IGBT) manufacturing method
A reverse conducting insulated gate bipolar transistor (IGBT) manufacturing method, comprising the following steps: providing a substrate having an IGBT structure formed on the front surface thereof; implanting P+ ions onto the back surface of the substrate; forming a channel on the back surface of the substrate through photolithography and etching processes; planarizing the back surface of the substrate through a laser scanning process to form P-type and N-type interval structures; and forming a back surface collector by conducting a back metalizing process on the back surface of the substrate. Laser scanning process can process only the back surface structure requiring annealing, thus solve the problem of the front surface structure of the reverse conducting IGBT restricting back surface annealing to a low temperature, improving the P-type and N-type impurity activation efficiency in the back surface structure of the reverse conducting IGBT, and enhancing the performance of the reverse conducting IGBT.
1. A method of manufacturing a reverse conducting insulated gate bipolar transistor, comprising the following steps:
providing a substrate having an IGBT structure formed on a front side thereof;
implanting P+ ions to a back side of the substrate;
forming a trench on the back side of the substrate using photolithography, etching process;
planarizing the back side of the substrate using laser scanning technology to form a P-type and N-type interval structure; and
performing a back side metallization process at the back side of the substrate, and forming a back side collector.
2. The method of manufacturing the reverse conducting insulated gate bipolar transistor according to claim 1 , wherein after providing the substrate having the IGBT structure formed on the front side thereof, the method further comprises: grinding the substrate, and implanting N+ ions to the back side of the substrate to form a field stop layer.
3. The method of manufacturing the reverse conducting insulated gate bipolar transistor according to claim 1 , wherein the providing the substrate having the IGBT structure comprises: implanting N+ ions to the back side of the substrate to form a field stop layer and forming the IGBT structure at the front side of the substrate.
4. The method of manufacturing the reverse conducting insulated gate bipolar transistor according to claim 1 , wherein the forming the trench on the back side of the substrate using photolithography, etching process comprises:
depositing a dielectric layer;
removing partial dielectric layer using photolithography to form a desired pattern;
forming the trench by etching; and
removing the dielectric layer.
5. The method of manufacturing the reverse conducting insulated gate bipolar transistor according to claim 4 , wherein the trench has a depth of from 0.05 μm to 50 μm; and a width of from 0.1 μm to 500 μm.
6. The method of manufacturing the reverse conducting insulated gate bipolar transistor according to claim 4 , wherein the pattern is a circular or polygonal.
7. The method of manufacturing the reverse conducting insulated gate bipolar transistor according to claim 1 , wherein the substrate has a resistivity of from 0.001Ω*cm to 200Ω*cm, and a thickness of from 100 μm to 1000 μm.
8. The method of manufacturing the reverse conducting insulated gate bipolar transistor according to claim 1 , wherein the laser used in the laser scanning technology is pulse laser.
9. The method of manufacturing the reverse conducting insulated gate bipolar transistor according to claim 8 , wherein pulse duration of the pulse laser is from 100 ns to 2000 ns; an energy density thereof is from 1 to 10 J/cm 2 ; a wavelength of the pulse laser is from 200 nm to 10 μm.