Leak testing apparatus and method
In leak testing by an accumulation method, it is possible to reliably detect accumulated inspection gas, and the reliability of leak testing is enhanced by reduction in background or impurity gas. At least an openable/closeable part 29 of a capsule 20 is housed inside a chamber 10 of a leak testing apparatus 1 . A test workpiece 9 is housed in the capsule 20 . Gas inside the chamber 10 is evacuated by a vacuum pump 31 . A detector 2 detects inspection gas contained in this gas. The capsule 20 is continuously sealed for an accumulation time Ta, the capsule 20 is thereafter opened, and a leak is evaluated on the basis of detection information after the opening by the detector 2.
1. A leak testing apparatus for testing a leak of inspection gas from a test workpiece having an internal space, the leak testing apparatus comprising:
a capsule that has an openable/closeable part, and houses the test workpiece;
a chamber that has a larger inner capacity than an inner capacity of the capsule, and houses at least the openable/closeable part of the capsule;
a vacuum pump that evacuates gas inside the chamber;
a detector that detects the inspection gas from the chamber or the inspection gas in the chamber;
a capsule opener/closer that provides for closing the openable/closeable part at a certain stage of the evacuation to continuously seal the capsule for an accumulation time, and provides for opening the openable/closeable part to open inside of the capsule to inside of the chamber after the accumulation time elapses; and
an evaluator that evaluates the leak on the basis of detection information by the detector.
2. The leak testing apparatus according to claim 1 , wherein the inner capacity of the chamber is at least 5 times the inner capacity of the capsule.
3. The leak testing apparatus according to claim 1 , wherein the inner capacity of the chamber is at least 100 times the inner capacity of the capsule.
4. The leak testing apparatus according to claim 1 , wherein the detector detects a flow rate of the inspection gas contained in the evacuated gas, and the evaluator calculates a time integration amount of a detected flow rate by the detector over a measurement time after the opening of the openable/closeable part.
5. The leak testing apparatus according to claim 4 , wherein a time constant τc of the evacuation is not less than 0.1 seconds and not more than 1 second, wherein the time constant τc is expressed as:
τc=V/C
where V (m 3 ) is the inner capacity of the chamber and C (m 3 /s) is conductance of the inspection gas contained in the evacuated gas conducted from the chamber.
6. The leak testing apparatus according to claim 4 , wherein the evaluator estimates an amount of inspection gas originated from a place other than the inside of the capsule, which is included in the time integration amount, from a detected flow rate by the detector during the accumulation time, and evaluates the leak on the basis of an amount of inspection gas originated from the inside of the capsule, which is obtained by deducting the estimated gas amount from the time integration amount, and a flow rate of the inspection gas originated from the inside of the capsule, which is calculated from the accumulation time and the measurement time.
7. The leak testing apparatus according to claim 4 , wherein the chamber is provided with a partition that is displaceable between a block position for partitioning the inside of the chamber into a first chamber and a second chamber larger than the first chamber, and a communication position for communicating the first and second chambers,
the first chamber houses the capsule, and the second chamber is continued to the vacuum pump, and
the partition is put at the block position when the test workpiece is taken in/out, and the partition is put at the communication position during the accumulation time and the measurement time.
8. The leak testing apparatus according to claim 1 , wherein the evacuation of the chamber by the vacuum pump is stopped during the opening of the openable/closeable part,
the detector detects partial pressure of the inspection gas, and
the evaluator evaluates the leak on the basis of a degree of a change of the partial pressure associated with the opening of the openable/closeable part.
9. The leak testing apparatus according to claim 1 , further comprising a monitor that monitors internal pressure of the capsule.
10. A leak testing apparatus for testing a leak of inspection gas from a test workpiece having an internal space, the leak testing apparatus comprising:
a collection capsule having a plurality of recesses for housing respective test workpieces, and an openable/closeable part of the recesses, each of the plurality of recesses configuring the internal space of the capsule;
a chamber that has a larger inner capacity than an inner capacity of the capsule, wherein at least the openable/closeable part of the collection capsule is housed inside the chamber;
a vacuum pump that evacuates gas inside the chamber;
a detector that detects the inspection gas from the chamber or the inspection gas in the chamber;
a capsule opener/closer that provides for closing the openable/closeable part at a certain stage of the evacuation to continuously seal the capsule for an accumulation time, and provides for opening the openable/closeable part to open inside of the capsule to inside of the chamber after the accumulation time elapses; and
an evaluator that evaluates the leak on the basis of detection information by the detector.
11. A leak testing method for testing a leak of inspection gas from a test workpiece having an internal space, the leak testing method comprising the steps of:
housing the test workpiece in a capsule having an openable/closeable part;
housing at least the openable/closeable part of the capsule in a chamber having a larger inner capacity than an inner capacity of the capsule;
evacuating gas inside the chamber by a vacuum pump;
detecting the inspection gas from the chamber or the inspection gas in the chamber by a detector;
closing the openable/closeable part at a certain stage of the evacuation to continuously seal the capsule for an accumulation time;
opening the openable/closeable part to open inside of the capsule to inside of the chamber after the accumulation time elapses; and
evaluating the leak on the basis of detection information by the detector.
12. The leak testing method according to claim 11 , wherein the step of detecting includes detecting a flow rate of the inspection gas contained in the evacuated gas by the detector, wherein the method further includes a step of calculating a time integration amount of the detected flow rate by the detector over a measurement time after the opening of the openable/closeable part, and wherein the step of evaluating includes evaluating the leak on the basis of the time integration amount.
13. The leak testing method according to claim 12 , wherein the method further includes a step of estimating an amount of inspection gas originated from a place other than the inside of the capsule, which is included in the time integration amount from a detected flow rate by the detector during the accumulation time, and wherein the step of evaluating includes evaluating the leak on the basis of an amount of inspection gas originated from the inside of the capsule, which is obtained by deducting the estimated gas amount from the time integration amount, and a flow rate of the inspection gas originated from the inside of the capsule, which is calculated from the accumulation time and the measurement time.
14. The leak testing method according to claim 13 , wherein a time constant τc of the evacuation of the inspection gas is not less than 0.1 seconds and not more than 1 second and the measurement time is at least 3 times and at most 6 times the time constant of the evacuation of the inspection gas, wherein the time constant τc is expressed as:
τc=V/C
where V (m 3 ) is the inner capacity of the chamber and C (m 3 /s) is the conductance of the inspection gas contained in the evacuated gas conducted from the chamber.
15. The leak testing method according to claim 13 , wherein the method further includes a step of monitoring a sealing condition of the capsule by monitoring the internal pressure of the capsule during the accumulation time.
16. The leak testing method according to claim 12 , wherein a time constant τc of the evacuation of the inspection gas is not less than 0.1 seconds and not more than 1 second, wherein the time constant τc is expressed as:
τc=V/C
where V (m 3 ) is the inner capacity of the chamber and C (m 3 /s) is the conductance of the inspection gas contained in the evacuated gas conducted from the chamber.
17. The leak testing method according to claim 16 , wherein the measurement time is at least 3 times and at most 6 times the time constant of the evacuation of the inspection gas.
18. The leak testing method according to claim 11 , wherein the method further includes a step of stopping the evacuation of the chamber by the vacuum pump during the opening of the openable/closeable part, wherein the step of detecting includes detecting partial pressure of the inspection gas in the chamber by the detector, and wherein the step of evaluating includes evaluating the leak on the basis of a degree of a change in the partial pressure associated with the opening of the openable/closeable part.
19. The leak testing method according to claim 18 , wherein the method further includes a step of monitoring a sealing condition of the capsule by monitoring the internal pressure of the capsule during the accumulation time.
20. The leak testing method according to claim 11 , wherein the method further includes a step of monitoring a sealing condition of the capsule by internal pressure of the capsule during the accumulation time.