Method for producing mold for nanoimprinting and anti-reflective article
This method for producing a mold for nanoimprinting in which a minute bumpy structure has been formed at the surface of a roller-shaped aluminum substrate of which the surface has been machined has: a polishing step for mechanically polishing the surface of the roller-shaped aluminum substrate, of which the surface has been machined, at least until the average crystal grain size changes; and a minute bumpy structure formation step for anodizing the aluminum substrate after the polishing step and forming a minute bumpy structure. The anti-reflective article has a minute bumpy structure at the surface, and in the wavelength region of visible light, has a color difference (E*) to the origin represented in the L*a*b* color system and derived by means of formula (1) of no greater than 0.9, or a chroma (C*) determined by means of formula (2) of no greater than 0.7. E *={( L *) 2 +( a *) 2 +( b *) 2 } 1/2 (1) C *={( a *) 2 +( b *) 2 } 1/2 (2)
1. A method for producing a mold for nanoimprinting, the mold having a concave-convex microstructure formed on a surface of a roll-shaped aluminum substrate in which the surface has been machined, the method comprising:
a polishing step of mechanically polishing the surface of the roll-shaped aluminum substrate in which the surface has been machined until at least an average crystal grain size changes; and
a concave-convex microstructure forming step of forming a concave-convex microstructure by anodizing the aluminum substrate after the polishing step.
2. The method for producing a mold for nanoimprinting according to claim 1 , wherein the surface of the aluminum substrate is mechanically polished in the polishing step until the average crystal grain size becomes 1 μm or more.
3. The method for producing a mold for nanoimprinting according to claim 2 , wherein the surface of the aluminum substrate is mechanically polished in the polishing step until the average crystal grain size becomes 5 μm or more.
4. The method for producing a mold for nanoimprinting according to claim 1 , wherein the surface of the aluminum substrate is removed by a thickness of 1 μm or more in the polishing step.
5. The method for producing a mold for nanoimprinting according to claim 4 , wherein the surface of the aluminum substrate is removed by a thickness of 3 μm or more in the polishing step.
6. The method for producing a mold for nanoimprinting according to claim 1 , further comprising a surface finishing step of finishing the surface of the roll-shaped aluminum substrate simultaneously with polishing step or between the polishing step and the concave-convex microstructure forming step.
7. The method for producing a mold for nanoimprinting according to claim 1 , wherein chemical mechanical polishing is performed in the polishing step.
8. The method for producing a mold for nanoimprinting according to claim 1 , wherein a purity of at least the surface of the aluminum substrate is 99% or more.
9. The method for producing a mold for nanoimprinting according to claim 1 , wherein in the concave-convex microstructure forming step, an anodizing step of anodizing the aluminum substrate to form fine pores and a fine pore diameter-increasing step of increasing diameters of the fine pores by dissolving at least a part of the fine pores are repeatedly performed.
10. The method for producing a mold for nanoimprinting according to claim 9 , wherein a treatment time of the anodization is shorter than 5 minutes.
11. The method for producing a mold for nanoimprinting according to claim 9 , wherein the anodizing step and the fine pore diameter-increasing step is are repeatedly performed 15 times or less in total.