Ni-based alloy excellent in hot forgeability, high-temperature oxidation resistance, and high-temperature halogen gas corrosion resistance, and member made of the same
There is provided a Ni-based alloy excellent in hot forgeability, high-temperature oxidation resistance, and high-temperature halogen gas corrosion resistance that is suitable as constituent materials, such as a baking tray for chip capacitor, a baking tray for lithium battery cathode material, a CVD apparatus member, a PVD apparatus member, an LCD apparatus member, and a semiconductor manufacturing apparatus member. The Ni-based alloy contains, by weight, 2.0 to 5.0% Al, 0.1 to 2.5% Si, 0.1 to 1.5% Mn, 0.001 to 0.01% B, 0.001 to 0.1% of Zr, and the balance of Ni with inevitable impurities and excels in hot forgeability, high-temperature oxidation resistance, and high-temperature halogen gas corrosion resistance. The Ni-based alloy may further contain 0.8 to 4.0% Cr.
1. A Ni-based alloy suitable for hot forgeability, high-temperature oxidation resistance, and high-temperature halogen gas corrosion resistance, the Ni-based alloy having a composition consisting of, by weight,
2.0 to 5.0% Al,
0.1 to 2.5% Si,
0.1 to 1.5% Mn,
0.001 to 0.01% B,
0.001 to 0.1% Zr,
optionally 0.8 to 4.0% Cr, and
the balance of Ni with inevitable impurities.
2. The Ni-based alloy suitable for hot forgeability, high-temperature oxidation resistance, and high-temperature halogen gas corrosion resistance according to claim 1 , the Ni-based alloy having a composition consisting of, by weight,
3.6 to 4.2% Al,
1.1 to 1.7% Si,
0.2 to 0.7% Mn,
0.001 to 0.007% B,
0.001 to 0.06% Zr,
optionally 1.6 to 2.3% Cr, and
the balance of Ni with inevitable impurities.
3. The Ni-based alloy suitable for hot forgeability, high-temperature oxidation resistance, and high-temperature halogen gas corrosion resistance according to claim 1 , wherein chromium is present at 0.8 to 4.0% by weight.
4. The Ni-based alloy suitable for hot forgeability, high-temperature oxidation resistance, and high-temperature halogen gas corrosion resistance according to claim 2 , wherein chromium is present at 1.6 to 2.3% by weight.
5. A member made of the Ni-based alloy according to claim 1 , wherein the member is a baking tray for chip capacitor or lithium battery cathode material, a CVD apparatus member, a PVD apparatus member, an LCD apparatus member, or a semiconductor manufacturing apparatus member.
6. A member made of the Ni-based alloy according to claim 3 , wherein the member is a baking tray for chip capacitor or lithium battery cathode material, a CVD apparatus member, a PVD apparatus member, an LCD apparatus member, or a semiconductor manufacturing apparatus member.