Resonator element, electronic device, electronic apparatus, and moving object
A gyro element as a resonator element includes a drive resonating arm as a drive portion that is driven by application of a voltage, and a detection resonating arm as a detection portion in which charge is generated in response to a Coriolis force generated in the drive resonating arm. An amount of charge detected in the detection resonating arm in a state where the Coriolis force is not generated is greater than 0% and equal to or less than 0.1% of an amount of charge generated in the drive resonating arm when driving the drive resonating arm.
1. A resonator element comprising:
a drive portion that is driven by application of a voltage; and
a detection circuit including a detection portion and a charge amplifier, charge being generated in the detection portion in response to a Coriolis force generated in the drive portion, the charge amplifier amplifying an output signal generated in the detection portion based on the charge, wherein
an allowable range of an amount of charge detected in the detection portion in a state where the Coriolis force is not generated is set to be greater than 0% and equal to or less than 0.1% of an amount of charge generated in the drive portion when driving the drive portion, where the allowable range is set such that an angular velocity applied to the resonator element is detected without saturation of the charge amplifier.
2. The resonator element according to claim 1 , further comprising
a base portion, wherein
the drive portion extends from one edge of the base portion, and
the detection portion extends from another edge on the side opposite to the one edge of the base portion with the base portion as a boundary in a plan view.
3. The resonator element according to claim 2 , further comprising
a pair of adjustment portions, wherein
the pair of adjustment portions extend from the base portion, so that the pair of adjustment portions are located so as to interpose the detection portion or the drive portion therebetween.
4. The resonator element according to claim 3 , wherein
a weight portion is provided on a distal end side of at least one of the drive portion, the detection portion, and the adjustment portions on the side opposite to one edge side of the base portion.
5. An electronic device comprising:
the resonator element according to claim 3 ;
an electronic component including a drive circuit that excites at least the drive portion; and
a package that accommodates at least one of the resonator element and the electronic component.
6. The resonator element according to claim 2 , wherein
a weight portion is provided on a distal end side of at least one of the drive portion and the detection portion on the side opposite to one edge side of the base portion.
7. An electronic device comprising:
the resonator element according to claim 6 ;
an electronic component including a drive circuit that excites at least the drive portion; and
a package that accommodates at least one of the resonator element and the electronic component.
8. An electronic device comprising:
the resonator element according to claim 2 ;
an electronic component including a drive circuit that excites at least the drive portion; and
a package that accommodates at least one of the resonator element and the electronic component.
9. The resonator element according to claim 1 , further comprising:
a base portion; and
coupling portions extending on both sides of the base portion from the base portion along a first direction, wherein
the detection portion extends on both sides of the base portion from the base portion along a second direction intersecting the first direction, and
the drive portion extends on both sides of each of the coupling portions from each of the coupling portions along the second direction, so that the drive portions are located so as to interpose the detection portions therebetween.
10. The resonator element according to claim 9 , wherein
a weight portion is provided on a distal end side of at least one of the drive portion and the detection portion on the side opposite to one edge side of the base portion.
11. An electronic device comprising:
the resonator element according to claim 9 ;
an electronic component including a drive circuit that excites at least the drive portion; and
a package that accommodates at least one of the resonator element and the electronic component.
12. An electronic device comprising:
the resonator element according to claim 1 ;
an electronic component including a drive circuit that excites at least the drive portion; and
a package that accommodates at least one of the resonator element and the electronic component.
13. An electronic apparatus comprising the resonator element according to claim 1 .
14. A moving object comprising the resonator element according to claim 1 .