Method of fabricating nanostructures using macro pre-patterns
A method of fabricating nanostructures using macro pre-patterns according to the present invention, which comprises either depositing a target material on a substrate having macro pre-patterns formed thereon, or applying a target material to a substrate and then forming macro pre-patterns on the substrate, and then depositing the target material on the side surface of the macro pre-patterns by an ion bombardment phenomenon occurring during etching, provides a three-dimensional nanostructures with high aspect ratio and uniformity can be fabricated by a simple process at low cost by using the ion bombardment phenomenon occurring during physical ion etching, thereby achieving the high performance of future nano-devices, such as nanosized electronic devices, optical devices, bio devices and energy devices.
1. A method for fabricating three-dimensional nanostructures of a target material using macro pre-patterns, the method essentially consisting of the steps of:
(a) depositing target material on a transparent substrate having macro pre-patterns formed thereon, said macro pre-patterns having a top surface and side surface;
(b) transferring all of the target material from the transparent substrate to form a single layer of the target material on the side surface of the macro pre-patterns by etching, thereby fabricating target material-macro pre-pattern composite structures; and
(c) removing only the macro pre-patterns from said target material-macro pre-pattern composite structures, thereby forming three-dimensional nanostructures of the target material;
wherein the target material is selected from the group consisting of gold, platinum, silver, copper, nickel, iron, titanium, molybdenum, chromium, indium tin oxide (ITO), and mixtures thereof; and
wherein the single layer of target material is not deposited on the top surface of the macro pre-patterns;
wherein the single layer of target material is deposited to a thickness of 15 nm or less; and
wherein the three-dimensional nanostructures of target material are in direct contact with the transparent substrate.
2. The method for fabricating three-dimensional nanostructures according to claim 1 , wherein the macro pre-patterns are obtained by depositing a macro pre-pattern material on a substrate and carrying out a lithography process or an imprinting process.
3. The method for fabricating three-dimensional nanostructures according to claim 1 , wherein the substrate is selected from the group consisting of polyethylene terephthalate, polyacylate, polyethylene, quartz, glass, silicon, silicon oxide and mixtures thereof.
4. The method for fabricating three-dimensional nanostructures according to claim 1 , wherein the pre-pattern material is selected from the group consisting of polystyrene, chitosan, polyvinyl alcohol, polymethylmethacrylate, photoresist and mixtures thereof.
5. The method for fabricating three-dimensional nanostructures according to claim 1 , the etching is milling or sputtering.
6. The method for fabricating three-dimensional nanostructures according to claim 5 , the milling is carried out by forming plasma using a gas under a pressure of 0.1-10 mTorr, and then accelerating the plasma in the range of 100-5,000 eV.
7. The method for fabricating three-dimensional nanostructures according to claim 1 , further comprising a step of forming a pattern protective layer after the step (c) of removing the macro pre-patterns.
8. A method of fabricating three-dimensional nanostructures of a target material using macro pre-patterns, the method essentially consisting of the steps of:
(a) depositing target material on a transparent substrate and forming macro pre-patterns thereon, said macro pre-patterns having a top surface and side surface;
(b) transferring all of the target material from the transparent substrate to form a single layer of the target material on the side surface of the macro pre-patterns by etching, thereby fabricating target material-macro pre-pattern composite structures; and
(c) removing only the macro pre-patterns from said target material-macro pre-pattern composite structures, thereby forming three-dimensional nanostructures of the target material;
wherein the target material is selected from the group consisting of gold, platinum, silver, copper, nickel, iron, titanium, molybdenum, chromium, indium tin oxide (ITO), and mixtures thereof; and
wherein the single layer of target material is not deposited on the top surface of the macro pre-patterns;
wherein the single layer of target material is deposited to a thickness of 15 nm or less; and
wherein the three-dimensional nanostructures of target material are in direct contact with the transparent substrate.