Semiconductor device and method of fabricating the same
View Patent ↗A semiconductor device and a method of forming the same, the semiconductor device includes a substrate, a metal-oxide-semiconductor (MOS) transistor, a plug, a hydrogen blocking layer and an oxide semiconductor (OS) structure. The MOS transistor is disposed on the substrate, and the plug is disposed on the MOS transistor to electrically connect thereto. The hydrogen blocking layer is disposed only on sidewalls of the plug, wherein the hydrogen blocking layer includes a high-k dielectric layer. The OS structure is disposed on the substrate, wherein the OS structure includes an oxide semiconductor layer.
1. A semiconductor device, comprising:
a substrate;
a metal oxide semiconductor (MOS) transistor disposed on the substrate;
a plug disposed on the MOS transistor to electrically connect thereto;
a hydrogen blocking layer disposed only on sidewalls of the plug, wherein the hydrogen blocking layer comprises a high-k dielectric material; and
an oxide semiconductor (OS) structure disposed on the substrate, wherein the OS structure comprises an oxide semiconductor layer, two source/drain structures disposed on the oxide semiconductor layer, a first gate electrode disposed between the source/drain structures on the oxide semiconductor layer, and a second gate disposed below the oxide semiconductor layer, wherein the first gate electrode and the second gate electrode both overlap the oxide semiconductor layer.
2. The semiconductor device according to claim 1 , wherein the OS structure is disposed on the plug.
3. The semiconductor device according to claim 1 , wherein the OS structure is disposed below the plug.
4. The semiconductor device according to claim 1 , wherein the MOS transistor comprises a source/drain region, and the plug contacts the source/drain region.
5. The semiconductor device according to claim 1 , further comprising:
another plug disposed on the MOS transistor, wherein the another plug contacts a gate electrode of the MOS transistor; and
another hydrogen blocking layer, disposed only on sidewalls on the another plug.
6. The semiconductor device according to claim 1 , wherein the MOS transistor comprises a gate electrode, and the plug contacts the gate electrode.
7. The semiconductor device according to claim 1 , wherein the hydrogen blocking layer has a thickness being about 10 angstroms to 15 angstroms.
8. The semiconductor device according to claim 1 , wherein the oxide semiconductor layer comprises a monolayer structure or a multilayer structure.
9. The semiconductor device according to claim 1 , wherein the high-k dielectric material comprises hafnium oxide, hafnium silicon oxide, hafnium silicon oxynitride, aluminum oxide, lanthanum oxide or hafnium zirconium oxide.
10. A method of forming a semiconductor device, comprising:
providing a substrate;
forming a metal-oxide-semiconductor (MOS) transistor on the substrate;
forming a plug on the MOS transistor to electrically connect thereto;
forming a hydrogen blocking layer disposed only on sidewalls of the plug, wherein the hydrogen blocking layer comprises a high-k dielectric material; and
forming an oxide semiconductor (OS) structure on the substrate, wherein the OS structure comprises an oxide semiconductor layer, two source/drain structures disposed on the oxide semiconductor layer, a first gate electrode disposed between the source/drain structures on the oxide semiconductor layer, and a second gate disposed below the oxide semiconductor layer, wherein the first gate electrode and the second gate electrode both overlap the oxide semiconductor layer.
11. The method of forming the semiconductor device according to claim 10 , wherein the OS stricture is formed after the plug is formed.
12. The method of forming the semiconductor device according to claim 10 , wherein the OS structure is formed before the plug is formed.
13. The method of forming the semiconductor device according to claim 10 , wherein the forming of the plug comprises:
forming an opening in a dielectric layer on the substrate; and
forming the plug filled in the opening.
14. The method of forming the semiconductor device according to claim 13 , wherein the forming of the hydrogen blocking layer comprises:
forming a material layer covering sidewalls and bottom walls of the opening before forming the plug filled in the opening; and
removing the material layer on the bottom walls of the opening.
15. The method of forming the semiconductor device according to claim 10 , wherein the plug contacts a source/drain region of the MOS transistor.
16. The method of forming the semiconductor device according to claim 15 , further comprising:
forming another plug on the MOS transistor to electrically connect thereto, wherein the another plug contacts a gate electrode of the MOS transistor; and
forming another hydrogen blocking layer, only on sidewalls on the another plug.
17. The method of forming the semiconductor device according to claim 16 , wherein the two plugs are formed simultaneously.
18. The method of forming the semiconductor device according to claim 10 , wherein the high-k dielectric material comprises hafnium oxide, hafnium silicon oxide, hafnium silicon oxynitride, aluminum oxide, lanthanum oxide or hafnium zirconium oxide.