Integrated assemblies containing germanium
View Patent ↗Some embodiments include an integrated assembly having a first semiconductor structure containing heavily-doped silicon, a germanium-containing interface material over the first semiconductor structure, and a second semiconductor structure over the germanium-containing interface material. The second semiconductor structure has a heavily-doped lower region adjacent the germanium-containing interface material and has a lightly-doped upper region above the heavily-doped lower region. The lightly-doped upper region and heavily-doped lower region are majority doped to a same dopant type, and join to one another along a boundary region. Some embodiments include an integrated assembly having germanium oxide between a first silicon-containing structure and a second silicon-containing structure. Some embodiments include methods of forming assemblies.
1. An integrated circuit assembly, comprising:
a first semiconductor structure comprising heavily-doped silicon;
a germanium-containing interface material over the first semiconductor structure, the germanium-containing interface material consisting of a material selected from non-oxidized germanium and partially oxidized germanium;
a protective material comprising one or both of Si and Ge over the germanium-containing interface material;
an opening extending entirely through the protective material; and
a second semiconductor structure extending within the opening and contacting the germanium-containing interface material; the second semiconductor structure having a heavily-doped lower region adjacent the germanium-containing interface material and having a lightly-doped upper region above the heavily-doped lower region; the lightly-doped upper region and heavily-doped lower region being majority doped to a same dopant type, and joining to one another along a boundary region.
2. The integrated assembly of claim 1 wherein said same dopant type is n-type.
3. The integrated assembly of claim 1 wherein said same dopant type is p-type.
4. The integrated assembly of claim 1 wherein the germanium-containing interface material comprises germanium oxide.
5. The integrated assembly of claim 1 wherein the germanium-containing interface material comprises non-oxidized germanium.
6. The integrated assembly of claim 1 comprising a gating structure adjacent the boundary region.
7. The integrated assembly of claim 6 wherein the gating structure is comprised by a select device, with the select device being a source side select gate (SGS) device; and further comprising a plurality of memory cells connected in series with the select device.
8. The integrated assembly of claim 7 wherein the memory cells are vertically stacked over the select device.
9. The integrated assembly of claim 8 wherein the vertically-stacked memory cells are part of a NAND memory array.
10. An integrated circuit assembly comprising less than fully oxidized semiconductor material between a first conductively dope silicon structure and a second conductively doped silicon structure, the semiconductor of the less than fully oxidized semiconductor material consisting of germanium, wherein:
the first conductively doped silicon structure is heavily-doped; and
the second conductively doped silicon structure has a heavily-doped first region adjacent the less than fully oxidized semiconductor material and has a lightly-doped second region adjacent the heavily-doped first region; the lightly-doped second region and heavily-doped first region being majority doped to a same dopant type, and joining to one another along a boundary region.
11. The integrated assembly of claim 10 comprising a gating structure adjacent the boundary region.
12. The integrated assembly of claim 11 wherein the gating structure is comprised by a select device, with the select device being a source side select gate (SGS) device; and further comprising a plurality of memory cells connected in series with the select device.
13. The integrated assembly of claim 12 wherein the memory cells are vertically stacked over the select device.
14. The integrated assembly of claim 13 wherein the vertically stacked memory cells are part of a NAND memory array.