Method of manufacturing a MISFET on an SOI substrate
Occurrence of short-channel characteristics and parasitic capacitance of a MOSFET on a SOI substrate is prevented. A sidewall having a stacked structure obtained by sequentially stacking a silicon oxide film and a nitride film is formed on a side wall of a gate electrode on the SOI substrate. Subsequently, after an epitaxial layer is formed beside the gate electrode, and then, the nitride film is removed. Then, an impurity is implanted into an upper surface of the semiconductor substrate with using the gate electrode and the epitaxial layer as a mask, so that a halo region is formed in only a region of the upper surface of the semiconductor substrate which is right below a vicinity of both ends of the gate electrode.
1. A method of manufacturing a semiconductor device including a semiconductor substrate, a first insulating film formed over the semiconductor substrate and a first semiconductor layer formed over the first insulating film, the method comprising:
(a) forming a dummy gate electrode over the first semiconductor layer, the dummy gate electrode having side surfaces;
(b) forming first impurity regions of a first conductive type in the first semiconductor layer by an ion implantation method, wherein the first impurity regions are used for a part of source and drain regions of a MISFET;
(c) forming first side walls over the first semiconductor layer;
(d) forming epitaxial layers over the first semiconductor layer and each side surface of the dummy gate electrode;
(e) after the steps (a) to (d), forming second impurity regions of the first conductive type in the first semiconductor layer and the epitaxial layers by an ion implantation method, wherein the second impurity regions are used for a part of the source and drain regions of the MISFET;
(e1) after the step (e), forming an etching stopper film on each of the semiconductor layer, the first side walls, and the epitaxial layers;
(f) after the step (e1), removing the dummy gate electrode so as to form an opening; and
(g) after the step (f), embedding a gate electrode of the MISFET in the opening.
2. The method of manufacturing a semiconductor device according to the claim 1 , further comprising:
(h) between the steps (e) and (f), forming silicide layers over the epitaxial layers.
3. The method of manufacturing a semiconductor device according to the claim 1 , further comprising:
(i) between the steps (f) and (g), forming a third impurity region of the first conductive type or a second conductive type in the upper surface of the semiconductor substrate by an ion implantation method.
4. The method of manufacturing a semiconductor device according to the claim 1 , wherein the first conductive type is n+.
5. The method of manufacturing a semiconductor device according to the claim 1 , further comprising:
(j) between the steps (e1) and (f), forming an interlayer insulating film over the MISFET; and
(k) after the step (j), polishing the interlayer insulating film so as to expose an upper surface of the dummy gate electrode.
6. The method of manufacturing a semiconductor device according to the claim 5 , further comprising:
(1) after the step (f), forming a gate insulating film to cover a bottom surface of an opening portion and an inner wall thereof.
7. The method of manufacturing a semiconductor device according to the claim 6 ,
wherein the gate insulating film is formed of a HfSiON film, a HfON film or a HfO film.
8. The method of manufacturing a semiconductor device according to the claim 1 ,
wherein the dummy gate electrode is formed of a polysilicon film.
9. The method of manufacturing a semiconductor device according to the claim 1 ,
wherein the gate electrode is formed of a TiN film.