Semiconductor package and method of forming the same
The present disclosure provides a semiconductor package, including a first device having a first joining surface, a first conductive component at least partially protruding from the first joining surface, a second device having a second joining surface facing the first joining surface, and a second conductive component at least exposing from the second joining surface. The first conductive component and the second conductive component form a joint having a first beak. The first beak points to either the first joining surface or the second joining surface.
1. A semiconductor package, comprising:
a first device having a first joining surface;
a first conductive component at least partially protruding from the first joining surface;
a second device having a second joining surface facing the first joining surface; and
a second conductive component at least exposing from the second joining surface,
wherein the first conductive component and the second conductive component forming a joint having a first beak contour and a second beak contour, the first beak contour having a tip at a first side of the joint, the tip at a first side of the joint pointing to either the first joining surface or the second joining surface, and the second beak contour having a tip at a second side of the joint, the tip at a second side of the joint pointing to either the first joining surface or the second joining surface.
2. The semiconductor package of claim 1 , wherein the first device is selected from a group consisting essentially of a semiconductor wafer and a semiconductor chip.
3. The semiconductor package of claim 2 , wherein the second device is selected from a group consisting essentially of a semiconductor wafer and a semiconductor chip.
4. The semiconductor package of claim 1 , wherein the first conductive component is a through dielectric via (TDV) or a through silicon via (TSV).
5. The semiconductor package of claim 1 , wherein a width of the first conductive component and a width of the second conductive component viewing from a cross section are different.
6. The semiconductor package of claim 1 , wherein a width of the first conductive component viewing from a cross section is below 25 micrometer.
7. The semiconductor package of claim 1 , wherein the first conductive component is a contact pad on the first joining surface.
8. The semiconductor package of claim 1 , further comprising an underfill between the first joining surface and the second joining surface.
9. The semiconductor package of claim 1 , an angle between an extension of the first beak contour and an extension of the second beak contour is in a range of from about 60 to about 170 degrees.
10. A method for manufacturing a semiconductor package, comprising:
providing a first device having a first joining surface and a first conductive component at least partially protruding from the first joining surface;
providing a second device having a second joining surface and a second conductive component at least exposing from the second joining surface;
performing an etch over either the first conductive component or the second conductive component to obtain an uneven top surface of the first conductive component or the second conductive component; and
joining the first conductive component and the second conductive component.
11. The method of claim 10 , wherein the performing an etch comprises performing a copper wet etch, a copper dry etch, or a combination thereof.
12. The method of claim 11 , wherein the copper wet etch at least comprises applying 1% H 2 SO 4 for a duration of from about 10 to 180 seconds.
13. The method of claim 11 , wherein the copper dry etch at least comprises an etching gas of Chlorine.
14. The method of claim 10 , wherein the performing an etch over either the first conductive component or the second conductive component to obtain an uneven top surface of the first conductive component or the second conductive component comprises forming at least one tip on the top surface.
15. The method of claim 14 , wherein the at least one tip on the top surface comprises an angle in a range of from about 60 to 170 degrees.
16. A method for manufacturing a hybrid bonded semiconductor package, comprising:
providing a first device having a first joining surface and a first conductive component at least partially protruding from the first joining surface;
providing a second device having a second joining surface and a second conductive component at least exposing from the second joining surface
performing an etch over either the first conductive component or the second conductive component to obtain at least one tip over a top surface of the first conductive component or a top surface of the second conductive component;
joining the first conductive component and the second conductive component under a constant temperature.
17. The method of claim 16 , wherein the constant temperature is lower than 300 degrees Celsius.
18. The method of claim 16 , wherein the performing the etch over either the first conductive component or the second conductive component to obtain at least one tip over a top surface of the first conductive component or the second conductive component comprising applying 1% H 2 SO 4 until an angle of the tip being in a range of from about 60 to about 170 degrees.
19. The method of claim 16 , wherein the first conductive component is a through silicon via (TSV) or a through dielectric via (TDV).
20. The method of claim 16 , further comprising scrubbing the top of the first conductive component and the top surface of the second conductive component.