Semiconductor memory device
According to one embodiment, a semiconductor memory device includes a semiconductor substrate, a memory cell array disposed on the semiconductor substrate, a capacitor and a control circuit. The memory cell array includes a plurality of memory cells. The control circuit supplies a voltage to the memory cell array. The memory cell array includes a first conductive body disposed in a first region on the semiconductor substrate. The first conductive body extends in a first direction intersecting with a surface of the substrate. The capacitor includes first and second electrodes disposed in a second region different from the first region on the semiconductor substrate. The electrodes each include a second conductive body extending in the first direction. The first conductive body and the second conductive body include an identical material.
1. A semiconductor memory device comprising:
a semiconductor substrate;
a memory cell array disposed above the semiconductor substrate, the memory cell array including a plurality of memory cells;
a capacitor; and
a control circuit that supplies a voltage to the memory cell array, wherein
the memory cell array includes a first conductive body disposed in a first region above the semiconductor substrate, the first conductive body extending in a first direction intersecting with a surface of the substrate,
the capacitor includes first and second electrodes disposed in a second region different from the first region above the semiconductor substrate,
the first and second electrodes each comprise a second conductive body extending in the first direction,
the first conductive body and the second conductive body include an identical material,
the memory cell array further includes:
a plurality of first wirings extending in a second direction intersecting with the first direction;
a plurality of second wirings extending in a third direction intersecting with the second direction; and
a third wiring connected to the first wiring, the third wiring extending in the first direction,
the memory cell is disposed between the first wiring and the second wiring, and
the first conductive body comprises the third wiring.
2. The semiconductor memory device according to claim 1 , wherein
the first conductive body and the second conductive body each have a columnar shape.
3. A semiconductor memory device, comprising:
a semiconductor substrate;
a memory cell array disposed above the semiconductor substrate, the memory cell array including a plurality of memory cells;
a capacitor; and
a control circuit that supplies a voltage to the memory cell array, wherein
the memory cell array includes a first conductive body disposed in a first region above the semiconductor substrate, the first conductive body extending in a first direction intersecting with a surface of the substrate,
the capacitor includes first and second electrodes disposed in a second region different from the first region above the semiconductor substrate,
the first and second electrodes each comprise a second conductive body extending in the first direction,
the first conductive body and the second conductive body include an identical material,
wherein
the memory cell array further includes:
a plurality of first wirings laminated in the first direction; and
a second wiring that has a longitudinal direction in the first direction,
the memory cell is disposed between the first wiring and the second wiring, and
the first conductive body comprises the second wiring.
4. A semiconductor memory device, comprising:
a semiconductor substrate;
a memory cell array disposed above the semiconductor substrate, the memory cell array including a plurality of memory cells;
a capacitor; and
a control circuit that supplies a voltage to the memory cell array, wherein
the memory cell array includes a first conductive body disposed in a first region above the semiconductor substrate, the first conductive body extending in a first direction intersecting with a surface of the substrate,
the capacitor includes first and second electrodes disposed in a second region different from the first region above the semiconductor substrate,
the first and second electrodes each comprise a second conductive body extending in the first direction,
the first conductive body and the second conductive body include an identical material,
wherein
the memory cell array further includes:
a plurality of first wirings extending in a second direction intersecting with the first direction; and
a plurality of second wirings extending in a third direction intersecting with the first direction and the second direction, and
each memory cell includes:
a memory transistor including first and second terminals and a gate terminal, the first terminal being connected to the first wiring, the gate terminal being connected to the second wiring; and
another capacitor connected to the second terminal of the memory transistor, and
the first conductive body comprises the other capacitor.
5. A semiconductor memory device, comprising:
a semiconductor substrate;
a memory cell array disposed above the semiconductor substrate, the memory cell array including a plurality of memory cells;
a capacitor; and
a control circuit that supplies a voltage to the memory cell array, wherein
the memory cell array includes a first conductive body disposed in a first region above the semiconductor substrate, the first conductive body extending in a first direction intersecting with a surface of the substrate,
the capacitor includes first and second electrodes disposed in a second region different from the first region above the semiconductor substrate,
the first and second electrodes each comprise a second conductive body extending in the first direction,
the first conductive body and the second conductive body include an identical material, and wherein
the semiconductor memory device further includes a transistor layer that includes a plurality of transistors disposed between the semiconductor substrate and a layer including the capacitor, wherein
the transistors are connected in series, and
the second conductive bodies have one ends, each of the one ends being connected between the adjacent transistors.
6. The semiconductor memory device according to claim 1 , wherein
the first regions and the second regions are plurally disposed above the semiconductor substrate,
the plurality of second regions are each disposed adjacent to the first regions, the control circuit supplies a voltage to the capacitor in the second region adjacent to the selected first region, and
the control circuit does not supply a voltage to the capacitor in the second region adjacent to the unselected first region.
7. A semiconductor memory device, comprising:
a semiconductor substrate;
a memory cell array disposed above the semiconductor substrate, the memory cell array including a plurality of memory cells;
a capacitor; and
a control circuit that supplies a voltage to the memory cell array, wherein
the memory cell array includes a first conductive body disposed in a first region above the semiconductor substrate, the first conductive body extending in a first direction intersecting with a surface of the substrate,
the capacitor includes first and second electrodes disposed in a second region different from the first region above the semiconductor substrate,
the first and second electrodes each comprise a second conductive body extending in the first direction,
the first conductive body and the second conductive body include an identical material, and
the semiconductor memory device further includes
a first insulating layer disposed between the adjacent memory cells; and
a second insulating layer disposed between the adjacent second conductive bodies, wherein
the second insulating layer has a permittivity higher than a permittivity of the first insulating layer.
8. The semiconductor memory device according to claim 3 , wherein
the first regions and the second regions are plurally disposed above the semiconductor substrate,
the plurality of second regions are each disposed adjacent to the first regions,
the control circuit supplies a voltage to the capacitor in the second region adjacent to the selected first region, and
the control circuit does not supply a voltage to the capacitor in the second region adjacent to the unselected first region.
9. The semiconductor memory device according to claim 4 , wherein
the first regions and the second regions are plurally disposed above the semiconductor substrate,
the plurality of second regions are each disposed adjacent to the first regions,
the control circuit supplies a voltage to the capacitor in the second region adjacent to the selected first region, and
the control circuit does not supply a voltage to the capacitor in the second region adjacent to the unselected first region.
10. The semiconductor memory device according to claim 5 , wherein
the first regions and the second regions are plurally disposed above the semiconductor substrate,
the plurality of second regions are each disposed adjacent to the first regions,
the control circuit supplies a voltage to the capacitor in the second region adjacent to the selected first region, and
the control circuit does not supply a voltage to the capacitor in the second region adjacent to the unselected first region.
11. The semiconductor memory device according to claim 7 , wherein
the first regions and the second regions are plurally disposed above the semiconductor substrate,
the plurality of second regions are each disposed adjacent to the first regions,
the control circuit supplies a voltage to the capacitor in the second region adjacent to the selected first region, and
the control circuit does not supply a voltage to the capacitor in the second region adjacent to the unselected first region.
12. The semiconductor memory device according to claim 1 , wherein
the first and second electrodes each comprise a plurality of second conductive bodies and a connecting wiring, the second conductive bodies extending in the first direction, the connecting wiring connecting the plurality of second conductive bodies.
13. The semiconductor memory device according to claim 2 , wherein
the first and second electrodes each comprise a plurality of second conductive bodies and a connecting wiring, the second conductive bodies extending in the first direction, the connecting wiring connecting the plurality of second conductive bodies.
14. The semiconductor memory device according to claim 3 , wherein
the first and second electrodes each comprise a plurality of second conductive bodies and a connecting wiring, the second conductive bodies extending in the first direction, the connecting wiring connecting the plurality of second conductive bodies.
15. The semiconductor memory device according to claim 4 , wherein
the first and second electrodes each comprise a plurality of second conductive bodies and a connecting wiring, the second conductive bodies extending in the first direction, the connecting wiring connecting the plurality of second conductive bodies.
16. The semiconductor memory device according to claim 5 , wherein
the first and second electrodes each comprise a plurality of second conductive bodies and a connecting wiring, the second conductive bodies extending in the first direction, the connecting wiring connecting the plurality of second conductive bodies.
17. The semiconductor memory device according to claim 6 , wherein
the first and second electrodes each comprise a plurality of second conductive bodies and a connecting wiring, the second conductive bodies extending in the first direction, the connecting wiring connecting the plurality of second conductive bodies.
18. The semiconductor memory device according to claim 7 , wherein
the first and second electrodes each comprise a plurality of second conductive bodies and a connecting wiring, the second conductive bodies extending in the first direction, the connecting wiring connecting the plurality of second conductive bodies.
19. The semiconductor memory device according to claim 8 , wherein
the first and second electrodes each comprise a plurality of second conductive bodies and a connecting wiring, the second conductive bodies extending in the first direction, the connecting wiring connecting the plurality of second conductive bodies.
20. The semiconductor memory device according to claim 9 , wherein
the first and second electrodes each comprise a plurality of second conductive bodies and a connecting wiring, the second conductive bodies extending in the first direction, the connecting wiring connecting the plurality of second conductive bodies.