Imprint apparatus, method of calibrating correction mechanism, and method of manufacturing article
An imprint apparatus includes a mold holding unit configured to hold a mold, a correction mechanism configured to correct a shape of a pattern formed in the mold to a desired shape by applying a force to the mold held in the mold holding unit, and a controller configured to assume a plurality of mold pattern shapes for a specific mold, calculate a parameter for associating the plurality of assumed mold pattern shapes and a deformation amount of the specific mold by causing the correction mechanism to apply the force to the specific mold to obtain the deformation amount of the specific mold so that the plurality of assumed mold pattern shapes are formed, and calibrate the correction mechanism using the parameter.
1. An imprint apparatus for forming a pattern of an imprint material on a substrate, the imprint apparatus comprising:
a mold chuck configured to hold a mold;
a shape corrector including an actuator configured to apply a force to the mold held in the mold chuck;
a substrate holding unit configured to hold the substrate and including a reference mark;
a measurement unit configured to measure a relative position between a mark on the mold and the reference mark; and
a hardware controller configured to execute instructions to:
cause the shape corrector to physically apply a plurality of target values of the force to a specific mold,
obtain an actual deformation amount of the specific mold deformed by the shape corrector for each of the plurality of target values of the force physically applied to the specific mold based on a relative position between a mark on the specific mold and the reference mark measured by the measurement unit,
obtain a value of a parameter for associating each of the plurality of target values of the force physically applied to the specific mold and the actual deformation amount of the specific mold for each of the plurality of target values of the force physically applied to the specific mold,
calibrate the shape corrector based on the obtained value of the parameter, and
control the calibrated shape corrector to correct a shape of a pattern formed in a mold to a desired shape before forming the pattern of the imprint material on the substrate using the mold having the desired shape.
2. The imprint apparatus according to claim 1 , wherein the specific mold is a calibration mold held in the mold chuck when the shape corrector is calibrated using the parameter.
3. An imprint apparatus for forming a pattern of an imprint material on a substrate, the imprint apparatus comprising:
a mold chuck configured to hold a mold;
a shape corrector including an actuator configured to apply a force to the mold held in the mold chuck;
a detector configured to detect the force applied to the mold or a measured value corresponding to an actual deformation amount of the mold when the force is applied; and
a hardware controller configured to execute instructions to:
cause the shape corrector to physically apply a plurality of target values of the force to a specific mold,
obtain a value of a parameter for associating each of the plurality of target values of the force physically applied to the specific mold and an actual deformation amount of the specific mold for each of the plurality of target values of the force physically applied to the specific mold,
calibrate the shape corrector based on the obtained value of the parameter, and
control the calibrated shape corrector to correct a shape of a pattern formed in a mold to a desired shape before forming the pattern of the imprint material on the substrate using the mold having the desired shape,
wherein the hardware controller obtains the measured value corresponding to the actual deformation amount of the specific mold after driving the shape corrector to be in a non-contact state in which the shape corrector does not contact with the specific mold and after a correction value, for which an output value of the detector becomes zero or matches a reference value in the non-contact state, is calculated and added to the output value.
4. The imprint apparatus according to claim 1 , wherein the hardware controller performs the calibration of the shape corrector simultaneously with replacement of the substrate or supplying the imprint material on the substrate.
5. The imprint apparatus according to claim 3 , wherein the hardware controller manages the parameter for every type of the mold.
6. An imprint apparatus for forming a pattern of an imprint material on a substrate, the imprint apparatus comprising:
a mold chuck configured to hold a mold;
a shape corrector including an actuator configured to apply a force to the mold held in the mold chuck;
a detector configured to detect the force applied to the mold or a measured value corresponding to an actual deformation amount of the mold when the force is applied; and
a hardware controller configured to execute instructions to:
cause the shape corrector to physically apply a plurality of target values of the force to a specific mold,
obtain a value of a parameter for associating each of the plurality of target values of the force physically applied to the specific mold and an actual deformation amount of the specific mold for each of the plurality of target values of the force physically applied to the specific mold,
calibrate the shape corrector based on the obtained value of the parameter, and
control the calibrated shape corrector to correct a shape of a pattern formed in a mold to a desired shape before forming the pattern of the imprint material on the substrate using the mold having the desired shape,
wherein the hardware controller re-calculates the parameter using the same mold as the specific mold used at the time of calculating the parameter when the calibration of the shape corrector is performed at a desired time interval, calculates a second parameter related to a linearity error or an offset error of the detector based on the re-calculated parameter and calibrates the shape corrector using the second parameter.
7. The imprint apparatus according to claim 6 , wherein the second parameter is managed separately from the parameter.
8. A method of calibrating a shape corrector including an actuator configured to apply a force to a mold used to form a pattern of an imprint material on a substrate, the method comprising:
physically applying a plurality of target values of the force to a specific mold using the shape corrector;
obtaining an actual deformation amount of the specific mold deformed by the shape corrector for each of the plurality of target values of the force physically applied to the specific mold based on a relative position between a mark on the specific mold and a reference mark on a substrate holding unit holding the substrate;
obtaining a value of a parameter for associating each of the plurality of target values of the force physically applied to the specific mold and the actual deformation amount of the specific mold for each of the plurality of target values of the force physically applied to the specific mold;
calibrating the shape corrector based on the obtained value of the parameter; and
controlling the calibrated shape corrector to correct a shape of a pattern formed in a mold to a desired shape before forming the pattern of the imprint material on the substrate using the mold having the desired shape.
9. A method of manufacturing an article, the method comprising: performing pattern formation on a substrate using an imprint apparatus; and
processing the substrate on which the pattern formation is performed;
wherein the imprint apparatus includes:
a mold chuck configured to hold a mold;
a shape corrector including an actuator configured to apply a force to the mold held in the mold chuck;
a substrate holding unit configured to hold the substrate and including a reference mark;
a measurement unit configured to measure a relative position between a mark on the mold and the reference mark; and
a hardware controller configured to execute instructions to:
cause the shape corrector to physically apply a plurality of target values of the force to a specific mold,
obtain an actual deformation amount of the specific mold deformed by the shape corrector for each of the plurality of target values of the force physically applied to the specific mold based on a relative position between a mark on the specific mold and the reference mark measured by the measurement unit,
obtain a value of a parameter for associating each of the plurality of target values of the force physically applied to the specific mold and the actual deformation amount of the specific mold for each of the plurality of target values of the force physically applied to the specific mold,
calibrate the shape corrector based on the obtained value of the parameter, and
control the calibrated shape corrector to correct a shape of a pattern formed in a mold to a desired shape before forming the pattern of the imprint material on the substrate using the mold having the desired shape.
10. A method of manufacturing an article, the method comprising: performing pattern formation on a substrate using a method of calibrating a shape corrector including an actuator configured to apply a force to a mold to correct a shape of a pattern formed in the mold to a desired shape before a pattern of an imprint material is formed on the substrate using the mold; and
processing the substrate on which the pattern formation is performed;
wherein the method of calibrating the shape corrector includes:
physically applying a plurality of target values of the force to a specific mold using the shape corrector;
obtaining an actual deformation amount of the specific mold deformed by the shape corrector for each of the plurality of target values of the force physically applied to the specific mold based on a relative position between a mark on the specific mold and a reference mark on a substrate holding unit holding the substrate;
obtaining a value of a parameter for associating each of the plurality of target values of the force physically applied to the specific mold and the actual deformation amount of the specific mold for each of the plurality of target values of the force physically applied to the specific mold;
calibrating the shape corrector based on the obtained value of the parameter; and
controlling the calibrated shape corrector to correct the shape of the pattern formed in the mold to the desired shape before forming the pattern of the imprint material on the substrate.