Optical device with precoated underfill
A method for fabricating an optical multi-chip module (MCM) includes temporarily curing an underfill material on a chip including an optical device to prevent flow of the underfill material. The chip is flip-chip mounted on a waveguide module having a mirror for directing light to or from the chip, wherein the underfill material is disposed between the chip and the waveguide module. The underfill material is cured to adhere the chip to the waveguide module.
1. A method for fabricating an optical multi-chip module (MCM), comprising:
temporarily curing an underfill material on a chip including at least one optical device to prevent flow of the underfill material into a mirror cavity;
flip-chip mounting the chip on a waveguide module having a mirror for directing light to or from the chip, wherein the underfill material forms a gap, determined by the temporarily cured underfill material, between the chip and the waveguide module; and
curing the underfill material to adhere the chip to the waveguide module, wherein the mirror cavity remains free of underfill material.
2. The method as recited in claim 1 , wherein the underfill material includes a semi-curable and reflowable resin.
3. The method as recited in claim 1 , wherein the underfill material includes a resin.
4. The method as recited in claim 1 , wherein flip-chip mounting the chip includes soldering the chip to the waveguide module.
5. The method as recited in claim 1 , wherein temporarily curing the underfill material includes hardening the underfill material at between 100 degrees C. to about 140 degrees C.
6. The method as recited in claim 1 , further comprising spinning on the underfill material and removing the underfill material from chip electrodes.
7. The method as recited in claim 1 , wherein curing the underfill material includes:
reflowing the underfill material at a temperature of between about 130 degrees C. to about 160 degrees C. to provide adhesion; and
hardening the underfill material at a temperature of between about 200 degrees C. and about 220 degrees C.
8. A method for fabricating an optical multi-chip module (MCM), comprising:
depositing an underfill material over a wafer having a plurality of chips with raised electrodes, the plurality of chips including optical devices;
removing the underfill material from the raised electrodes;
temporarily curing the underfill material;
dicing the wafer to separate the plurality of chips;
flip-chip mounting the chip on a waveguide module having a mirror for directing light to or from the chip, wherein the underfill material forms a gap, determined by the temporarily cured underfill material, between the chip and the waveguide module; and
curing the underfill material to adhere the chip to the waveguide module, wherein the mirror cavity remains free of underfill material.
9. The method as recited in claim 8 , wherein the underfill material includes a semi-curable and reflowable resin.
10. The method as recited in claim 8 , wherein the underfill material includes a resin.
11. The method as recited in claim 8 , wherein flip-chip mounting the chip includes soldering the chip to the waveguide module.
12. The method as recited in claim 8 , wherein temporarily curing the underfill material includes hardening the underfill material at between 100 degrees C. to about 140 degrees C.
13. The method as recited in claim 8 , wherein depositing the underfill material includes spinning on the underfill material.
14. The method as recited in claim 13 , further comprising controlling a thickness of the underfill material by controlling a spinning speed.
15. The method as recited in claim 8 , wherein curing the underfill material includes:
reflowing the underfill material at a temperature of between about 130 degrees C. to about 160 degrees C. to provide adhesion; and
hardening the underfill material at a temperature of between about 200 degrees C. and about 220 degrees C.
16. The method as recited in claim 8 , wherein removing the underfill material from the raised electrodes includes employing lithography to develop and remove the underfill material from the raised electrodes.