Wiring substrate, method of manufacturing the same and electronic component device
A wiring substrate includes an electronic component mounting pad, an electrode pad arranged at an outer side of the electronic component mounting pad, a first insulation layer formed on the electronic component mounting pad and the electrode pad, an opening formed in the first insulation layer on the electronic component mounting pad, a connection hole formed in the first insulation layer on the electrode pad, and recess portions formed at the electronic component mounting pad in the opening and at the electrode pad in the connection hole, respectively.
1. A wiring substrate comprising:
an electronic component mounting pad;
an electrode pad arranged at an outer side of the electronic component mounting pad;
a first insulation layer formed on the electronic component mounting pad and the electrode pad;
an opening formed in the first insulation layer on the electronic component mounting pad;
a connection hole formed in the first insulation layer on the electrode pad; and
recess portions formed at the electronic component mounting pad in the opening and at the electrode pad in the connection hole, respectively, the recess portions each including an undercut portion that is overlaid by the first insulation layer.
2. The wiring substrate according to claim 1 , wherein the electronic component mounting pad and the electrode pad are formed of a metal foil.
3. The wiring substrate according to claim 1 , wherein the first insulation layer is a resin film.
4. The wiring substrate according to claim 1 , wherein a metal-plated layer is formed on the electrode pad in the connection hole.
5. An electronic component device comprising:
the wiring substrate according to claim 1 ;
an electronic component mounted on the electronic component mounting pad; and
a metallic wire connecting the electronic component and the electrode pad each other.
6. The wiring substrate according to claim 1 , wherein the undercut portion of the recess portion formed at the electronic component mounting pad is provided at each inner wall of the first insulation layer defining the opening, and the undercut portion of the recess portion formed at the electrode pad is provided at an inner side wall of the first insulation layer defining the connection hole.
7. A wiring substrate comprising:
an electrode pad;
a first insulation layer formed on the electrode pad;
a connection hole formed in the first insulation layer on the electrode pad; and
a recess portion formed at the electrode pad in the connection hole, the recess portion including an undercut portion that is overlaid by the first insulation layer.
8. The wiring substrate according to claim 7 , wherein the first insulation layer is a resin film.
9. The wiring substrate according to claim 7 , wherein a metal-plated layer is formed on the electrode pad in the connection hole.
10. An electronic component device comprising:
the wiring substrate according to claim 7 ; and
an electronic component flip-chip connected to the recess portion of the electrode pad in the connection hole.
11. A wiring substrate comprising:
an electronic component mounting pad;
an electrode pad arranged at an outer side of the electronic component mounting pad;
a first insulation layer formed on the electronic component mounting pad and the electrode pad;
an opening formed in the first insulation layer on the electronic component mounting pad;
a connection hole formed in the first insulation layer on the electrode pad;
first recess portions formed at the electronic component mounting pad in the opening and at the electrode pad in the connection hole, respectively;
a second insulation layer formed below the electronic component mounting pad and the electrode pad;
an opening formed in the second insulation layer below the electrode pad; and
a second recess portion formed at the electrode pad in the opening of the second insulation layer.
12. The wiring substrate according to claim 11 , wherein the first recess portion formed at the electrode pad in the connection hole of the first insulation layer and the second recess portion formed at the electrode pad in the opening of the second insulation layer are arranged to deviate from each other so that they are positioned in areas, which do not overlap with each other.