Replacement low-k spacer
View Patent ↗A semiconductor structure formed based on forming a dummy gate stack on a substrate including a sacrificial spacer on the peripheral of the dummy gate stack. The dummy gate stack is partially recessed. The sacrificial spacer is etched down to the partially recessed dummy gate stack. Remaining portions of the sacrificial spacer are etched leaving gaps around and above a remaining portion of the dummy gate stack. A first low-k spacer portion and a second low-k spacer portion are formed to fill gaps around the dummy gate stack and extend vertically along a sidewall of a dummy gate cavity. The first low-k spacer portion and the second low-k spacer portion are etched. A poly pull process is performed on the dummy gate stack. A replacement metal gate (RMG) structure is formed with the first low-k spacer portion and the second low-k spacer portion.
1. A method of forming a semiconductor structure comprising:
forming a dummy gate stack on a substrate including a sacrificial spacer on the peripheral of the dummy gate stack;
partially recessing the dummy gate stack;
etching the sacrificial spacer down to the partially recessed dummy gate stack;
etching remaining portions of the sacrificial spacer leaving gaps around and above a remaining portion of the dummy gate stack;
forming a first low-k spacer portion and a second low-k spacer portion to fill gaps around the remaining portions of the dummy gate stack and extending vertically along a sidewall of a dummy gate cavity;
etching the first low-k spacer portion and the second low-k spacer portion;
performing a poly pull process on the remaining portions of the dummy gate stack; and
forming a replacement metal gate (RMG) structure with the first low-k spacer portion and the second low-k spacer portion.
2. The method of claim 1 , wherein the sacrificial spacer comprises a silicon nitride spacer.
3. The method of claim 1 , wherein the sacrificial spacer comprises a first dielectric spacer portion and a second dielectric spacer portion.
4. The method of claim 3 , wherein forming the dummy gate stack comprises:
forming a source junction on the substrate adjacent the first dielectric spacer portion and a drain junction on the substrate adjacent the second dielectric spacer portion; and
depositing an oxide layer over the source junction and the drain junction.
5. The method of claim 4 , wherein the first low-k spacer portion and the second low-k spacer portion are formed prior to forming the RMG structure.
6. The method of claim 5 , further comprising:
forming a silicon nitride cap layer over the RMG structure and between the first low-k spacer portion and the second low-k spacer portion; and
performing chemical-mechanical planarization (CMP) to reduce a height of the silicon nitride cap layer down to the oxide layer.
7. The method of claim 5 , further comprising:
forming a silicon nitride cap layer over the RMG structure; and
performing chemical-mechanical planarization (CMP) to reduce a height of the silicon nitride cap layer to the oxide layer, wherein the silicon nitride cap layer completely covers the RMG structure.
8. The method of claim 5 , further comprising:
forming a low-k cap layer over the RMG structure and adjacent to the first low-k spacer portion and the second low-k spacer portion, wherein a height of the low-k cap layer is reduced to the oxide layer.
9. A method of forming a semiconductor structure comprising:
etching a sacrificial spacer down to a partially recessed dummy gate stack formed on a substrate;
forming a first low-k spacer portion and a second low-k spacer portion to fill gaps around the dummy gate stack and extending vertically along a sidewall of a dummy gate cavity;
etching the first low-k spacer portion and the second low-k spacer portion;
performing a poly pull process on the dummy gate stack; and
performing multiple depositions to form a replacement metal gate (RMG) structure with the first low-k spacer portion and the second low-k spacer portion.
10. The method of claim 9 , wherein the sacrificial spacer comprises a first dielectric spacer portion and a second dielectric spacer portion.
11. The method of claim 9 , wherein the first low-k spacer portion and the second low-k spacer portion are formed prior to forming the RMG structure.
12. The method of claim 11 , further comprising:
forming a silicon nitride cap layer over the RMG structure and between the first low-k spacer portion and the second low-k spacer portion; and
performing chemical-mechanical planarization (CMP) to reduce a height of the silicon nitride cap layer down to a formed oxide layer over the substrate.
13. The method of claim 11 , further comprising:
forming a silicon nitride cap layer over the RMG structure; and
performing chemical-mechanical planarization (CMP) to reduce a height of the silicon nitride cap layer to a formed oxide layer over the substrate, wherein the silicon nitride cap layer completely covers the RMG structure.
14. The method of claim 11 , further comprising:
forming a low-k cap layer over the RMG structure and adjacent to the first low-k spacer portion and the second low-k spacer portion, wherein a height of the low-k cap layer is reduced to a formed oxide layer over the substrate.