IP Library Granted Patent US 10,084,107
Granted Patent B2
US 10,084,107 · App. 14/954,831 · Granted Sep 25, 2018

Transparent conducting oxide for photovoltaic devices

Inventors: Jianming Fu (Palo Alto, CA); Zheng Xu (Pleasanton, CA); Jiunn Benjamin Heng (Los Altos Hills, CA); Chentao Yu (Sunnyvale, CA)
Assignee: Tesla, Inc.
H01L31/074H01L31/02167H01L31/022466H01L31/022475H01L31/072H01L31/075H01L31/1804H01L31/1868Y02E10/547Y02E10/548Y02P70/521
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Quick Facts
Patent No.
US 10,084,107
App. No.
14/954,831
Granted
Sep 25, 2018
Kind
B2
Abstract

One embodiment of the present invention provides a solar cell. The solar cell includes a Si base layer, a passivation layer situated above the Si base layer, a layer of heavily doped amorphous Si (a-Si) situated above the passivation layer, a first transparent-conducting-oxide (TCO) layer situated above the heavily doped a-Si layer, a back-side electrode situated below the Si base layer, and a front-side electrode situated above the first TCO layer. The first TCO layer comprises at least one of: GaInO, GaInSnO, ZnInO, and ZnInSnO.

Claims (16)

1. A photovoltaic structure, comprising:

a Si base layer;

a p-type doped amorphous Si layer positioned on a first side of the Si base layer;

an n-type doped semiconductor layer positioned on a second side of the Si base layer;

a first transparent-conductive-oxide layer positioned on and in direct contact with the p-type doped amorphous Si layer, wherein the first transparent-conductive-oxide layer has a work function that is greater than 5.7 eV and less than to 6.1 eV, thereby reducing potential barriers for carriers at an interface between the p-type doped amorphous Si layer and the first transparent-conductive-oxide layer; and

a second transparent-conductive-oxide layer positioned on and in direct contact with the n-type doped semiconductor layer, wherein the second transparent-conductive-oxide layer has a work function that is lower than the work function of the first transparent-conductive-oxide layer.

2. The photovoltaic structure of claim 1 , further comprising a first metallic grid positioned on the first transparent-conductive-oxide layer, wherein the first metallic grid comprises an electroplated layer that includes Cu.

3. The photovoltaic structure of claim 1 , further comprising a metallic grid positioned on the second transparent-conductive-oxide layer, wherein the metallic grid comprises an electroplated layer that includes Cu.

4. The photovoltaic structure of claim 1 , wherein the Si base layer includes a crystalline-Si substrate or an epitaxially formed crystalline-Si thin film.

5. The photovoltaic structure of claim 1 , further comprising at least one of:

a first passivation layer positioned between the Si base layer and the p-type doped amorphous Si layer; and

a second passivation layer positioned between the Si base layer and the p-type doped amorphous Si layer.

6. The photovoltaic structure of claim 5 , wherein the first passivation layer and the second passivation layer include at least one of: undoped amorphous Si and SiO x .

7. The photovoltaic structure of claim 1 , wherein the p-type doped amorphous Si layer comprises amorphous Si or amorphous Si containing carbon, and wherein the p-type doped amorphous Si layer has a doping concentration between 1×10 17 /cm 3 and 5×10 20 /cm 3 .

8. The photovoltaic structure of claim 1 , further comprising a third transparent-conductive-oxide layer positioned on the first transparent-conductive-oxide layer, wherein the third transparent-conductive-oxide is selected from a group consisting of: indium tin oxide (ITO), tin-oxide (SnO x ), aluminum doped zinc-oxide (ZnO:Al), Ga doped zinc-oxide (ZnO:Ga), and any combination thereof.

9. The photovoltaic structure of claim 1 , wherein the second transparent-conductive-oxide layer comprises indium tin oxide (ITO).

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 6, 2021
From: SOLARCITY CORPORATION
To: TESLA, INC.
Reel/Frame 056172/0062 →
Continuity (3)
Continuation 13155112 · Jun 7, 2011
Provisional Application 61353119 · Jun 9, 2010
Related Publication 20160087138A1 · Mar 24, 2016
Cited By (1)
US 12,464,834